| Effect of sidewall passivation in BCl3/N2 inductively coupled plasma etching of two-dimensional GaAs photonic crystals
Kirill A. Atlasov, Pascal Gallo, Alok Rudra, Benjamin Dwir, and Eli Kapon
pp. L21-L24
Abstract Full Text: [ HTML Sectioned HTML PDF (450 kB) ] Order | | | | Effects of Ga+ milling on InGaAsP quantum well laser with mirrors milled by focused ion beam
F. Vallini, D. S. L. Figueira, P. F. Jarschel, L. A. M. Barea, A. A. G. Von Zuben, and N. C. Frateschi
pp. L25-L27
Abstract Full Text: [ HTML Sectioned HTML PDF (215 kB) ] Order | | | | Analysis of dielectric constant of a self-forming barrier layer with Cu–Mn alloy on TEOS-SiO2
S.-M. Chung and J. Koike
pp. L28-L31
Abstract Full Text: [ HTML Sectioned HTML PDF (341 kB) ] Order | Articles | | Impact of in situ SiNx layer grown with metal organic vapor phase epitaxy on the electrical and optical properties of AlN/GaN metal insulator semiconductor field effect transistor structures
E. Cho, S. Seo, C. Jin, D. Pavlidis, G. Fu, J. Tuerck, and W. Jaegermann
pp. 2079-2083
Abstract Full Text: [ HTML Sectioned HTML PDF (425 kB) ] Order | | | | Analysis of thermally activated kinetics and uniformity of photoresist ashing process on 300 mm wafers
D. L. Mézerette, K. Tanimura, and G. K. Vinogradov
pp. 2084-2090
Abstract Full Text: [ HTML Sectioned HTML PDF (485 kB) ] Order | | | | Effects of exposure time on defects and demolding force in soft ultraviolet nanoimprint lithography
Xiangdong Ye, Yucheng Ding, Yugang Duan, Hongzhong Liu, and Bingheng Lu
pp. 2091-2096
Abstract Full Text: [ HTML Sectioned HTML PDF (442 kB) ] Order | | | | Inductively coupled plasma reactive ion etching of bulk ZnO single crystal and molecular beam epitaxy grown ZnO films
M. Mehta, M. Ruth, K. A. Piegdon, D. Krix, H. Nienhaus, and C. Meier
pp. 2097-2101
Abstract Full Text: [ HTML Sectioned HTML PDF (435 kB) ] Order | | | | Enhancement of operation temperature of InAs/GaAs quantum-dot infrared photodetectors with hydrogen-plasma treatment
Wei-Hsun Lin, Chi-Che Tseng, Kuang-Ping Chao, Shih-Yen Lin, and Meng-Chyi Wu
pp. 2102-2105
Abstract Full Text: [ HTML Sectioned HTML PDF (320 kB) ] Order | | | | Growth scaling of metal oxide columnar thin films deposited by glancing angle depositions
M. T. Taschuk, K. M. Krause, J. J. Steele, M. A. Summers, and M. J. Brett
pp. 2106-2111
Abstract Full Text: [ HTML Sectioned HTML PDF (255 kB) ] Order | | | | Effect of Ta buffer layer and thickness on the structural and magnetic properties of Co thin films
K. Vahaplar, S. Tari, H. Tokuc, and S. Okur
pp. 2112-2116
Abstract Full Text: [ HTML Sectioned HTML PDF (589 kB) ] Order | | | | Mechanism of reducing line edge roughness in ArF photoresist by using CF3I plasma
Eiichi Soda, Seiichi Kondo, Shuichi Saito, Koji Koyama, Butsurin Jinnai, and Seiji Samukawa
pp. 2117-2123
Abstract Full Text: [ HTML Sectioned HTML PDF (1177 kB) ] Order | | | | Structural and electrical properties of metal contacts on n-type ZnO thin film deposited by vacuum coating technique
C. Periasamy and P. Chakrabarti
pp. 2124-2127
Abstract Full Text: [ HTML Sectioned HTML PDF (343 kB) ] Order | | | | Transparent dual-gate InGaZnO thin film transistors: OR gate operation
Wantae Lim, E. A. Douglas, Jaewon Lee, Junghun Jang, V. Craciun, D. P. Norton, S. J. Pearton, F. Ren, S. Y. Son, J. H. Yuh, H. Shen, and W. Chang
pp. 2128-2131
Abstract Full Text: [ HTML Sectioned HTML PDF (330 kB) ] Order | | | | Plasma treatment methods to improve indium bump bonding via indium oxide removal
Frank Greer, Matthew Dickie, R. P. Vasquez, Todd J. Jones, Michael E. Hoenk, and Shouleh Nikzad
pp. 2132-2137
Abstract Full Text: [ HTML Sectioned HTML PDF (1637 kB) ] Order | | | | Highly sensitive positive-working molecular resist based on new molecule
Shigeki Hattori, Arisa Yamada, Satoshi Saito, Koji Asakawa, Takeshi Koshiba, and Tetsuro Nakasugi
pp. 2138-2144
Abstract Full Text: [ HTML Sectioned HTML PDF (1033 kB) ] Order | | | | Pd/Ru/Au Ohmic contacts to InAlSb/InAs heterostructures for high electron mobility transistors
R. Dormaier, Q. Zhang, Y.-C. Chou, M. D. Lange, J. M. Yang, A. Oki, and S. E. Mohney
pp. 2145-2152
Abstract Full Text: [ HTML Sectioned HTML PDF (1082 kB) ] Order | | | | Controlled etching and regrowth of tunnel oxide for antenna-coupled metal-oxide-metal diodes
Badri Tiwari, Jeffrey A. Bean, Gergő Szakmány, Gary H. Bernstein, Patrick Fay, and Wolfgang Porod
pp. 2153-2160
Abstract Full Text: [ HTML Sectioned HTML PDF (973 kB) ] Order | | | | Nonlinear large deflection of nanopillars fabricated by focused ion-beam induced chemical vapor deposition using double-cantilever testing
Hiro Tanaka, Masaki Shinkai, Yoji Shibutani, and Yasuo Kogo
pp. 2161-2165
Abstract Full Text: [ HTML Sectioned HTML PDF (237 kB) ] Order | | | | Cu-plated through-wafer vias for AlGaN/GaN high electron mobility transistors on Si
K.-H. Chen, F. Ren, A. Pais, Huikai Xie, B. P. Gila, S. J. Pearton, J. W. Johnson, P. Rajagopal, J. C. Roberts, E. L. Piner, and K. J. Linthicum
pp. 2166-2169
Abstract Full Text: [ HTML Sectioned HTML PDF (537 kB) ] Order | | | | Fabrication and optical properties of Ti-doped W18O49 nanorods using a modified plasma-arc gas-condensation technique
Cherng-Yuh Su, Hsuan-Ching Lin, and Chung-Kwei Lin
pp. 2170-2174
Abstract Full Text: [ HTML Sectioned HTML PDF (460 kB) ] Order | | | | Effects of Si interlayer on resistance switching of Pt/Si/TiO2/Pt structures
Seunghee Go, Kyunghoon Jeong, Kwanwoo Lee, Ara Kim, Hyun Ruh, Chang Soo Kim, and Jaegab Lee
pp. 2175-2181
Abstract Full Text: [ HTML Sectioned HTML PDF (892 kB) ] Order | | | | Novel heterostructure of CdS nanoparticle/WO3 nanowhisker: Synthesis and photocatalytic properties
Hyeyoung Kim, Youngjo Tak, Karuppanan Senthil, Jinmyoung Joo, Sangmin Jeon, and Kijung Yong
pp. 2182-2186
Abstract Full Text: [ HTML Sectioned HTML PDF (437 kB) ] Order | | | | Evolution of surface morphology of dry-etched ZnO with Cl2/Ar plasma
Kuang-Po Hsueh, Ren-Jie Hou, and Chun-Ju Tun
pp. 2187-2191
Abstract Full Text: [ HTML Sectioned HTML PDF (635 kB) ] Order | | | | Effect of liquid dispensing on flow field for immersion lithography
Wenyu Chen, Ying Chen, Jun Zou, Xin Fu, Huayong Yang, Xiaodong Ruan, and Guofang Gong
pp. 2192-2199
Abstract Full Text: [ HTML Sectioned HTML PDF (1123 kB) ] Order | | | | The effect of acid on superconformal filling in 100 nm trenches
Joshua W. Gallaway and Alan C. West
pp. 2200-2205
Abstract Full Text: [ HTML Sectioned HTML PDF (336 kB) ] Order | | | | Organopalladium catalyst on S-terminated GaAs(001)-(2×6) surface
Tomoya Konishi, Takashi Toujyou, Takuma Ishikawa, Gavin R. Bell, and Shiro Tsukamoto
pp. 2206-2208
Abstract Full Text: [ HTML Sectioned HTML PDF (359 kB) ] Order | | | | Characterization of focused-ion-beam induced defect structures in graphite for the future guided self-assembly of molecules
Sarah E. O'Donnell and Petra Reinke
pp. 2209-2216
Abstract Full Text: [ HTML Sectioned HTML PDF (778 kB) ] Order | | | | Calculation of electron emission from a gated single nanowire
Da Lei, Weibiao Wang, Leyong Zeng, and Jingqiu Liang
pp. 2217-2221
Abstract Full Text: [ HTML Sectioned HTML PDF (268 kB) ] Order | | | | Electrical characterization of thin InAs films grown on patterned W/GaAs substrates
Gvidas Astromskas, L. Reine Wallenberg, and Lars-Erik Wernersson
pp. 2222-2226
Abstract Full Text: [ HTML Sectioned HTML PDF (384 kB) ] Order | | | | Comparison of conjugated polymer deposition techniques by photoluminescence spectroscopy
K. R. Lantz, R. Pate, A. D. Stiff-Roberts, A. G. Duffell, E. R. Smith, and H. O. Everitt
pp. 2227-2231
Abstract Full Text: [ HTML Sectioned HTML PDF (296 kB) ] Order | | | | Oxygen effects on radiation hardness of ZnO thin films
Emre Gür, Hatice Asıl, Kübra Çınar, C. Co kun, S. Tüzemen, Kadem Meral, Y. Onganer, and Korkmaz  erifoğlu
pp. 2232-2237
Abstract Full Text: [ HTML Sectioned HTML PDF (727 kB) ] Order | | | | Luminescence mechanisms in Si quantum dots-SiNx nanocomposite structures
Béchir Rezgui, Abel Sibai, Tetyana Nychyporuk, Mustapha Lemiti, and Georges Brémond
pp. 2238-2241
Abstract Full Text: [ HTML Sectioned HTML PDF (459 kB) ] Order | | | | Surface plasmon resonance of gold nanoparticles formed by cathodic arc plasma ion implantation into polymer
F. S. Teixeira, M. C. Salvadori, Mauro Cattani, S. M. Carneiro, and I. G. Brown
pp. 2242-2247
Abstract Full Text: [ HTML Sectioned HTML PDF (636 kB) ] Order | | | | Structural and luminescent properties of Er-doped ZnO films grown by metalorganic chemical vapor deposition
Yoshikazu Terai, Keisuke Yamaoka, Takashi Yamaguchi, and Yasufumi Fujiwara
pp. 2248-2251
Abstract Full Text: [ HTML Sectioned HTML PDF (312 kB) ] Order | | | | Etch stop in via-hole etching on aluminum interconnection using inductively coupled C2F6 plasma with O2 additive gas
Shin-ichi Imai and Nobuhiro Jiwari
pp. 2252-2258
Abstract Full Text: [ HTML Sectioned HTML PDF (556 kB) ] Order | | | | Nanoimprint mold fabrication and duplication for embedded servo and discrete track recording media
E. L. Tan, K. O. Aung, R. Sbiaa, S. K. Wong, H. K. Tan, W. C. Poh, S. N. Piramanayagam, and C. C. Chum
pp. 2259-2263
Abstract Full Text: [ HTML Sectioned HTML PDF (767 kB) ] Order | | | | Uniformity conditioning of diamond field emitter arrays
J. D. Jarvis, H. L. Andrews, C. A. Brau, B. K. Choi, J. Davidson, W.-P. Kang, and Y.-M. Wong
pp. 2264-2269
Abstract Full Text: [ HTML Sectioned HTML PDF (512 kB) ] Order | | | | Time-multiplexed, inductively coupled plasma process with separate SiCl4 and O2 steps for etching of GaAs with high selectivity
S. Golka, M. Arens, M. Reetz, T. Kwapien, S. Bouchoule, and G. Patriarche
pp. 2270-2279
Abstract Full Text: [ HTML Sectioned HTML PDF (3465 kB) ] Order | | | | Numerical approach for the theory of harmonic self-heating technique to measure thermophysical properties of suspended thin samples
Bo Feng, Zhixin Li, Xing Zhang, and G. P. Peterson
pp. 2280-2285
Abstract Full Text: [ HTML Sectioned HTML PDF (537 kB) ] Order | | | | Film-thickness dependence of 10 GHz Nb coplanar-waveguide resonators
Kunihiro Inomata, Tsuyoshi Yamamoto, Michio Watanabe, Kazuaki Matsuba, and Jaw-Shen Tsai
pp. 2286-2291
Abstract Full Text: [ HTML Sectioned HTML PDF (662 kB) ] Order | | | | Self-assembled monolayers of poly(ethylene glycol) siloxane as a resist for ultrahigh-resolution electron beam lithography on silicon oxide
Bo Gao, Gary H. Bernstein, and Marya Lieberman
pp. 2292-2300
Abstract Full Text: [ HTML Sectioned HTML PDF (1124 kB) ] Order | | | | Effect of etch-clean delay time on post-etch residue removal for front-end-of-line applications
Ingrid Vos, David Hellin, Guy Vereecke, Elizabeth Pavel, Werner Boullart, and Johan Vertommen
pp. 2301-2308
Abstract Full Text: [ HTML Sectioned HTML PDF (1474 kB) ] Order | | | | Diagnostics and modeling of CH4–CO2 plasmas for nanosmooth diamond deposition: Comparison to experimental data
T. Gries, L. Vandenbulcke, S. de Persis, O. Aubry, and J. L. Delfau
pp. 2309-2320
Abstract Full Text: [ HTML Sectioned HTML PDF (1021 kB) ] Order | Brief Reports and Comments | | Influence of room temperature control on atomic force microscope imaging
Joseph Fu, Chu Wei, and Theodore Vorburger
pp. 2321-2323
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