| Nickel-germanium soft x-ray zone plates Magnus Lindblom, Julia Reinspach, Olov von Hofsten, Michael Bertilson, Hans M. Hertz, and Anders Holmberg pp. L5-L7 Abstract Full Text: [ HTML Sectioned HTML PDF (255 kB) ] Order | | | Pd-catalyzed hydrogen sensing with InN nanobelts J. S. Wright, Wantae Lim, B. P. Gila, S. J. Pearton, F. Ren, Wei-Ta Lai, Li-Chyong Chen, Ming-Shien Hu, and Kuei-Hsien Chen pp. L8-L10 Abstract Full Text: [ HTML Sectioned HTML PDF (462 kB) ] Order | Regular Articles | | Interface stability in advanced high--metal-gate stacks C. Adelmann, A. Franquet, T. Conard, T. Witters, I. Ferain, J. Meersschaut, M. Jurczak, K. De Meyer, J. A. Kittl, and S. Van Elshocht pp. 1021-1025 Abstract Full Text: [ HTML Sectioned HTML PDF (278 kB) ] Order | | | Electrical properties of metal-ferroelectric (PbZr0.53Ti0.47O3)-polysilicon-insulator (Y2O3)-silicon capacitors and field-effect transistors Po-Chin Chan, Wen-Chieh Shih, Ingram Yin-Ku Chang, and Joseph Ya-min Lee pp. 1026-1029 Abstract Full Text: [ HTML Sectioned HTML PDF (380 kB) ] Order | | | Electrical levels of defect investigation of ZrO2 thin film by spectroscopic ellipsometry Y. R. Chen, P. Zhou, J. Li, and L. Y. Chen pp. 1030-1034 Abstract Full Text: [ HTML Sectioned HTML PDF (229 kB) ] Order | | | Tunable optical filters with nanostructured suspended gratings Jia-Sheng Ye, Takashi Kobayashi, Yoshiaki Kanamori, Fang-Ren Hu, and Kazuhiro Hane pp. 1035-1038 Abstract Full Text: [ HTML Sectioned HTML PDF (662 kB) ] Order | | | Contrast reversal effect in scanning electron microscopy due to charging H. Abe, S. Babin, S. Borisov, A. Hamaguchi, M. Kadowaki, Y. Miyano, and Y. Yamazaki pp. 1039-1042 Abstract Full Text: [ HTML Sectioned HTML PDF (383 kB) ] Order | | | Large-scale assembly of periodic nanostructures with metastable square lattices Chih-Hung Sun, Wei-Lun Min, Nicholas C. Linn, Peng Jiang, and Bin Jiang pp. 1043-1047 Abstract Full Text: [ HTML Sectioned HTML PDF (565 kB) ] Order | | | Laser micromachining of optical microstructures with inclined sidewall profile X. H. Wang, P. T. Lai, and H. W. Choi pp. 1048-1052 Abstract Full Text: [ HTML Sectioned HTML PDF (696 kB) ] Order | | | Field-emission properties of multiwalled carbon nanotubes in gas Q. Zou and M. Z. Wang pp. 1053-1056 Abstract Full Text: [ HTML Sectioned HTML PDF (364 kB) ] Order | | | Isolation of organic field-effect transistors by surface patterning with an UV/ozone process Sung-Jin Kim, Henry Beveridge, Jeffrey T. Koberstein, and Ioannis Kymissis pp. 1057-1059 Abstract Full Text: [ HTML Sectioned HTML PDF (288 kB) ] Order | | | Protein patterning by thermal nanoimprint lithography and NH3-plasma functionalization of polystyrene V. Trabadelo, A. Retolaza, S. Merino, A. Cruz, P. Heredia, A. Foelske, H. Schift, and C. Padeste pp. 1060-1062 Abstract Full Text: [ HTML Sectioned HTML PDF (298 kB) ] Order | | | Enhanced surface blistering of germanium with B+/H+ coimplantation Xiaobo Ma, Xiaofeng Du, Weili Liu, Chao Chen, Zhitang Song, and Chenglu Lin pp. 1063-1067 Abstract Full Text: [ HTML Sectioned HTML PDF (487 kB) ] Order | | | Improved field emission via laser processing of carbon nanotubes on paper substrates S. M. Lyth, S. J. Henley, and S. R. P. Silva pp. 1068-1071 Abstract Full Text: [ HTML Sectioned HTML PDF (308 kB) ] Order | | | Topography of epitaxial GaAs surfaces for growth S. Y. Lehman, A. Roshko, R. P. Mirin, K. A. Bertness, T. E. Harvey, and K. D. Cobry pp. 1072-1079 Abstract Full Text: [ HTML Sectioned HTML PDF (858 kB) ] Order | | | Fabrication and characterization of the substrate-free InGaN-based resonant-cavity light-emitting diodes for plastic optical fiber communications Chia-Lung Tsai, Jia-Qing Lin, and Ju-Ping Huang pp. 1080-1085 Abstract Full Text: [ HTML Sectioned HTML PDF (535 kB) ] Order | | | Carbon nanotube array vias for interconnect applications Jyh-Hua Ting, Ching-Chieh Chiu, and Fuang-Yuan Huang pp. 1086-1092 Abstract Full Text: [ HTML Sectioned HTML PDF (823 kB) ] Order | | | Inductively coupled plasma etching in fabrication of 2D InP-based photonic crystals Hailing Wang, Mingxin Xing, Gang Ren, and Wanhua Zheng pp. 1093-1096 Abstract Full Text: [ HTML Sectioned HTML PDF (1334 kB) ] Order | | | Novel tapered macrogate structure for carbon nanotube based field emission display Jin-Woo Jeong, Dae-Jun Kim, Kyung-Ik Cho, and Yoon-Ho Song pp. 1097-1100 Abstract Full Text: [ HTML Sectioned HTML PDF (407 kB) ] Order | | | Aperture-edge scattering in MeV ion-beam lithography. I. Scattering from a straight Ta aperture edge S. Gorelick, T. Sajavaara, and Harry J. Whitlow pp. 1101-1108 Abstract Full Text: [ HTML Sectioned HTML PDF (847 kB) ] Order | | | Aperture-edge scattering in MeV ion-beam lithography. II. Scattering from a rectangular aperture S. Gorelick, T. Sajavaara, and Harry J. Whitlow pp. 1109-1115 Abstract Full Text: [ HTML Sectioned HTML PDF (1154 kB) ] Order | | | Effect of nanocomposite gate dielectric roughness on pentacene field-effect transistor Wen-Hsi Lee and C. C. Wang pp. 1116-1121 Abstract Full Text: [ HTML Sectioned HTML PDF (504 kB) ] Order | | | Stochastic approach to modeling photoresist development Chris Mack pp. 1122-1128 Abstract Full Text: [ HTML Sectioned HTML PDF (465 kB) ] Order | | | dc and low frequency noise analysis of Fowler–Nordheim stress of n-channel metal-oxide semiconductor field-effect transistors processed in a 65 nm technology J. Armand, F. Martinez, P. Benoit, M. Valenza, E. Vincent, V. Huard, and K. Rochereau pp. 1129-1131 Abstract Full Text: [ HTML Sectioned HTML PDF (323 kB) ] Order | | | Theory of space charge limited regime of thermionic energy converter with negative electron affinity emitter Joshua Ryan Smith, Griff L. Bilbro, and Robert J. Nemanich pp. 1132-1141 Abstract Full Text: [ HTML Sectioned HTML PDF (951 kB) ] Order | | | Study of ion and vacuum ultraviolet-induced effects on styrene- and ester-based polymers exposed to argon plasma R. L. Bruce, S. Engelmann, T. Lin, T. Kwon, R. J. Phaneuf, G. S. Oehrlein, B. K. Long, C. G. Willson, J. J. Végh, D. Nest, D. B. Graves, and A. Alizadeh pp. 1142-1155 Abstract Full Text: [ HTML Sectioned HTML PDF (1259 kB) ] Order | | | Fabrication of crystalline Si spheres with atomic-scale surface smoothness using homogenized KrF excimer laser reformation system Shih-Che Hung, Shu-Chia Shiu, Cha-Hsin Chao, and Ching-Fuh Lin pp. 1156-1160 Abstract Full Text: [ HTML Sectioned HTML PDF (451 kB) ] Order | | | Low-resistance, highly transparent, and thermally stable Ti/ITO Ohmic contacts to n-GaN H. Guo, K. Brown, D. Korakakis, and X. A. Cao pp. 1161-1164 Abstract Full Text: [ HTML Sectioned HTML PDF (465 kB) ] Order | | | Dependence of photoresist surface modifications during plasma-based pattern transfer on choice of feedgas composition: Comparison of C4F8- and CF4-based discharges S. Engelmann, R. L. Bruce, F. Weilnboeck, M. Sumiya, T. Kwon, R. Phaneuf, G. S. Oehrlein, C. Andes, D. Graves, D. Nest, and E. A. Hudson pp. 1165-1179 Abstract Full Text: [ HTML Sectioned HTML PDF (1558 kB) ] Order | | | Ion beam sputtering of Ta2O5 films on thermoplast substrates as waveguides for biosensors W. Kulisch, D. Gilliland, G. Ceccone, L. Sirghi, H. Rauscher, P. N. Gibson, M. Zürn, F. Bretagnol, and F. Rossi pp. 1180-1190 Abstract Full Text: [ HTML Sectioned HTML PDF (1687 kB) ] Order | | | Thermal imprint into thin polymer layers below the critical molecular weight Nicolas Bogdanski, Matthias Wissen, Saskia Möllenbeck, and Hella-Christin Scheer pp. 1191-1194 Abstract Full Text: [ HTML Sectioned HTML PDF (439 kB) ] Order | | | Commercial molecular beam epitaxy production of high quality SrTiO3 on large diameter Si substrates X. Gu, D. Lubyshev, J. Batzel, J. M. Fastenau, W. K. Liu, R. Pelzel, J. F. Magana, Q. Ma, L. P. Wang, P. Zhang, and V. R. Rao pp. 1195-1199 Abstract Full Text: [ HTML Sectioned HTML PDF (467 kB) ] Order | | | Use of the concept “area efficiency of emission” in equations describing field emission from large-area electron sources Richard G. Forbes pp. 1200-1203 Abstract Full Text: [ HTML Sectioned HTML PDF (71 kB) ] Order | Brief Reports and Comments | | Multi-WO3 nanowire based gas detector Sungmu Kang, Jugdersuren Battogtokh, David A. McKeown, Andrew C. Buechele, Ian L. Pegg, and John Philip pp. 1204-1206 Abstract Full Text: [ HTML Sectioned HTML PDF (309 kB) ] Order | | | 3 thermal conductivity measurements of thin film dielectrics on silicon for use in cantilever-based IR imaging C. D. W. Jones, F. Pardo, C.-S. Pai, J. E. Bower, J. F. Miner, F. P. Klemens, R. A. Cirelli, E. J. Ferry, J. A. Taylor, M. R. Baker, B. S. Dennis, W. M. Mansfield, A. Kornblit, R. C. Keller, J. V. Gates et al. pp. 1207-1210 Abstract Full Text: [ HTML Sectioned HTML PDF (186 kB) ] Order | Shop Notes | | Integrated bake/chill system for across-wafer temperature uniformity control in photoresist processing Hui Tong Chua, Arthur Tay, and Yuheng Wang pp. 1211-1214 Abstract Full Text: [ HTML Sectioned HTML PDF (581 kB) ] Order | | | Dip-pen nanolithography on etched InAs(100) using homogeneous and mixed ink solutions John W. J. Slavin and Albena Ivanisevic pp. 1215-1217 Abstract Full Text: [ HTML Sectioned HTML PDF (380 kB) ] Order | Papers from the 1st International Conference on NanoManufacturing (NanoMan 2008) Preface [ Next Subject | Issue Index | Top / Bottom of Page] | | Preface Fengzhou Fang and Jack Luo p. 1220 Abstract Full Text: [ HTML Sectioned HTML PDF (21 kB) ] Order | Freeform Machining [ Previous / Next Subject | Issue Index | Top / Bottom of Page] | | Design of a magnetic-assistance superfinish module for freeform machining P. S. Pa pp. 1221-1225 Abstract Full Text: [ HTML Sectioned HTML PDF (294 kB) ] Order | | | Fast tool servo control for diamond-cutting microstructured optical components H. J. Zhang, S. J. Chen, M. Zhou, and Y. H. Yang pp. 1226-1229 Abstract Full Text: [ HTML Sectioned HTML PDF (389 kB) ] Order | | | Prediction and simulation of surface topomorphy in ultraprecision milling for optical freeform surface Zhong-Cheng Luo, Fang-Yu Peng, Xu-Bing Chen, and Li-Feng Wei pp. 1230-1237 Abstract Full Text: [ HTML Sectioned HTML PDF (1400 kB) ] Order | | | Diamond milling of nitrided steels for optical mold making J. Osmer, R. Gläbe, O. Riemer, E. Brinksmeier, S. Bütepage, and F. Hoffmann pp. 1238-1240 Abstract Full Text: [ HTML Sectioned HTML PDF (235 kB) ] Order | | | Enhancing the performance of polycrystalline diamond tools for machining WC by ultrasonic elliptical vibration cutting method Chandra Nath, Mustafizur Rahman, and Ken Soon Neo pp. 1241-1246 Abstract Full Text: [ HTML Sectioned HTML PDF (718 kB) ] Order | Nano and Micro Device and Systems [ Previous / Next Subject | Issue Index | Top / Bottom of Page] | | Controlled monolayer self-assembly process based on the atomic force microscopy nanoscratching method Y. D. Yan, T. Sun, B. Pan, J. W. Zhao, and S. Dong pp. 1247-1250 Abstract Full Text: [ HTML Sectioned HTML PDF (197 kB) ] Order | | | Microelectromechanical systems motion measurement and modal analysis based on Doppler interferometry G. X. Zhang, Y. Zhong, X. Hong, and C. L. Leng pp. 1251-1255 Abstract Full Text: [ HTML Sectioned HTML PDF (708 kB) ] Order | | | Impact of channel width and dummy length on performance enhancement in p-type metal oxide semiconductor field effect transistor with a silicon-germanium alloy stressor Chang-Chun Lee, Jacky Huang, Shu-Tong Chang, and Wei-Ching Wang pp. 1256-1260 Abstract Full Text: [ HTML Sectioned HTML PDF (674 kB) ] Order | | | Carrier backscattering characteristics of nanoscale strained complementary metal-oxide-semiconductor devices featuring the optimal stress engineering Shu-Tong Chang, Ming-Han Liao, Chang-Chun Lee, Jacky Huang, Wei-Ching Wang, and Bing-Fong Hsieh pp. 1261-1266 Abstract Full Text: [ HTML Sectioned HTML PDF (540 kB) ] Order | | | Design and optimization of wafer bonding packaged microelectromechanical systems thermoelectric power generators with heat dissipation path Chengkuo Lee and Jin Xie pp. 1267-1271 Abstract Full Text: [ HTML Sectioned HTML PDF (785 kB) ] Order | | | Development of a fine tool servo with force monitoring system for nanomachining applications S. W. Gan, M. Rahman, and H. S. Lim pp. 1272-1277 Abstract Full Text: [ HTML Sectioned HTML PDF (943 kB) ] Order | | | Development of three-axis desktop milling machine Q. Y. Wang, F. Z. Fang, and X. T. Hu pp. 1278-1284 Abstract Full Text: [ HTML Sectioned HTML PDF (1170 kB) ] Order | | | Development of the control system for three-axis ultraprecision compact micromilling machine Bo Wang, Peng Zhang, Yingchun Liang, and Shen Dong pp. 1285-1287 Abstract Full Text: [ HTML Sectioned HTML PDF (329 kB) ] Order | | | Study on structure optimization of a piezoelectric cantilever with a proof mass for vibration-powered energy harvesting system Yanning Li, Wen Li, Tong Guo, Zhidan Yan, Xing Fu, and Xiaotang Hu pp. 1288-1290 Abstract Full Text: [ HTML Sectioned HTML PDF (189 kB) ] Order | | | Silicon-on-insulation-based deformable mirror array for adaptive optics D. J. Wang, J. Yao, C. K. Qiu, F. R. Hu, and T. Q. Fan pp. 1291-1294 Abstract Full Text: [ HTML Sectioned HTML PDF (855 kB) ] Order | | | Development of microfluidic device and system for breast cancer cell fluorescence detection J. H. He, J. Reboud, H. M. Ji, C. Lee, and Y. Long pp. 1295-1298 Abstract Full Text: [ HTML Sectioned HTML PDF (302 kB) ] Order | Focused Ion Beam and Laser Fabrication [ Previous / Next Subject | Issue Index | Top / Bottom of Page] | | Low-cost x-ray mask based on micropattern sputtered lead film for x-ray lithography S. Mongpraneet, A. Wisitsora-at, R. Phatthanakun, N. Chomnawang, and A. Tuantranont pp. 1299-1303 Abstract Full Text: [ HTML Sectioned HTML PDF (470 kB) ] Order | | | Controlled morphology of microtools shaped using focused ion beam milling technique S. J. Zhang, F. Z. Fang, Z. W. Xu, and X. T. Hu pp. 1304-1309 Abstract Full Text: [ HTML Sectioned HTML PDF (889 kB) ] Order | | | Micro-electron-beam welding with a modified scanning electron microscopy: Findings and prospects U. Reisgen and T. Dorfmüller pp. 1310-1314 Abstract Full Text: [ HTML Sectioned HTML PDF (707 kB) ] Order | | | Design and calibration method for microvision three-dimensional laser scanner Changku Sun, Bin Liu, and Peng Wang pp. 1315-1318 Abstract Full Text: [ HTML Sectioned HTML PDF (506 kB) ] Order | | | Realization of nanosecond pulse laser micromachining system Chunyang Liu, Xing Fu, Yong Wu, Yi Li, Fengming Sun, and Xiaotang Hu pp. 1319-1322 Abstract Full Text: [ HTML Sectioned HTML PDF (516 kB) ] Order | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | |