| High-aspect-ratio inductively coupled plasma etching of InP using SiH4/Cl2: Avoiding the effect of electrode coverplate material
L. Gatilova, S. Bouchoule, S. Guilet, and G. Patriarche
J. Vac. Sci. Technol. B 29, 020601 (2011) (5 pages)
Abstract Full Text: [ Read Online (HTML) PDF (366 kB) ] Order | | | | Fabrication of cone-shaped subwavelength structures by utilizing a confined convective self-assembly technique and inductively coupled-plasma reactive-ion etching
Dae-Seon Kim, Min-Su Park, and Jae-Hyung Jang
J. Vac. Sci. Technol. B 29, 020602 (2011) (5 pages)
Abstract Full Text: [ Read Online (HTML) PDF (554 kB) ] Order | | | | Finite-element simulations of the effect of device design on channel temperature for AlGaN/GaN high electron mobility transistors
E. A. Douglas, F. Ren, and S. J. Pearton
J. Vac. Sci. Technol. B 29, 020603 (2011) (4 pages)
Abstract Full Text: [ Read Online (HTML) PDF (269 kB) ] Order | | | | Quantitative study on the enhancement of sidewall coverage of sputter-deposited film by partially tapering the sidewall of via holes
Chang-Gyu Kim and Won-Jong Lee
J. Vac. Sci. Technol. B 29, 020604 (2011) (6 pages)
Abstract Full Text: [ Read Online (HTML) PDF (240 kB) ] Order | | | | Modeling of tunneling through a three-layer gate stack with/without a quantum well
A. Mazurak, J. Walczak, and B. Majkusiak
J. Vac. Sci. Technol. B 29, 020605 (2011) (9 pages)
Abstract Full Text: [ Read Online (HTML) PDF (581 kB) ] Order | Articles | | Collective buckling of line arrays created by soft lithography
Ziguang Chen, Jiashi Yang, and Li Tan
J. Vac. Sci. Technol. B 29, 021001 (2011) (5 pages)
Abstract Full Text: [ Read Online (HTML) PDF (487 kB) ] Order | | | | Annealing temperature dependence of Ohmic contact resistance and morphology on InAlN/GaN high electron mobility transistor structures
C.-F. Lo, L. Liu, C. Y. Chang, F. Ren, V. Craciun, S. J. Pearton, Y. W. Heo, O. Laboutin, and J. W. Johnson
J. Vac. Sci. Technol. B 29, 021002 (2011) (5 pages)
Abstract Full Text: [ Read Online (HTML) PDF (913 kB) ] Order | | | | Circular apertures for contact hole patterning in 193 nm immersion lithography
C. J. Tay, C. Quan, M. L. Ling, G. S. Chua, S. K. Tan, and Q. Lin
J. Vac. Sci. Technol. B 29, 021003 (2011) (8 pages)
Abstract Full Text: [ Read Online (HTML) PDF (424 kB) ] Order | | | | Emission enhancement from nonpolar a-plane III-nitride nanopillar
Byung-Jae Kim, Younghun Jung, Michael A. Mastro, Jennifer Hite, Neeraj Nepal, Charles R. Eddy, Jr., and Jihyun Kim
J. Vac. Sci. Technol. B 29, 021004 (2011) (4 pages)
Abstract Full Text: [ Read Online (HTML) PDF (318 kB) ] Order | | | | Reduction of structural defects in a-plane GaN epitaxy by use of periodic hemispherical patterns in r-plane sapphire substrates
Z. H. Wu, Y. Q. Sun, J. Yin, Y.-Y Fang, J. N. Dai, C. Q. Chen, Q. Y. Wei, T. Li, K. W. Sun, A. M. Fischer, and F. A. Ponce
J. Vac. Sci. Technol. B 29, 021005 (2011) (4 pages)
Abstract Full Text: [ Read Online (HTML) PDF (526 kB) ] Order | | | | Inductively coupled plasma etching of high aspect ratio two-dimensional photonic crystals in Al-rich AlGaAs and AlGaAsSb
A. Larrue, D. Belharet, P. Dubreuil, S. Bonnefont, O. Gauthier-Lafaye, A. Monmayrant, F. Lozes-Dupuy, and S. Moumdji
J. Vac. Sci. Technol. B 29, 021006 (2011) (7 pages)
Abstract Full Text: [ Read Online (HTML) PDF (420 kB) ] Order | | | | Fabrication of sub-100-nm metal-oxide-semiconductor field-effect transistors with asymmetrical source/drain using I-line double patterning technique
Horng-Chih Lin, Tzu-I Tsai, Tien-Sheng Chao, Min-Feng Jian, and Tiao-Yuan Huang
J. Vac. Sci. Technol. B 29, 021007 (2011) (7 pages)
Abstract Full Text: [ Read Online (HTML) PDF (1044 kB) ] Order | | | | Low temperature processing of indium-tin-zinc oxide channel layers in fabricating thin-film transistors
Ki Chang Lee, Kwang-Min Jo, Sang-Yun Sung, Joon-Hyung Lee, Jeong-Joo Kim, Byoung-Seong Jeong, S. J. Pearton, D. P. Norton, and Young-Woo Heo
J. Vac. Sci. Technol. B 29, 021008 (2011) (4 pages)
Abstract Full Text: [ Read Online (HTML) PDF (258 kB) ] Order | | | | Radial compression studies of WS2 nanotubes in the elastic regime
Estelle Kalfon-Cohen, Ohad Goldbart, Roy Schreiber, Sidney R. Cohen, David Barlam, Tommy Lorenz, Andrey Enyashin, and Gotthard Seifert
J. Vac. Sci. Technol. B 29, 021009 (2011) (8 pages)
Abstract Full Text: [ Read Online (HTML) PDF (370 kB) ] Order | | | | Spectroscopic ellipsometry on thin titanium oxide layers grown on titanium by plasma oxidation
G. Droulers, A. Beaumont, J. Beauvais, and D. Drouin
J. Vac. Sci. Technol. B 29, 021010 (2011) (6 pages)
Abstract Full Text: [ Read Online (HTML) PDF (307 kB) ] Order | | | | Combination of thermodynamic model and precursor state for As and Sb incorporation behavior in GaAsSb/GaAs multiple-quantum wells
Jian-Ming Lin, Li-Chang Chou, and Hao-Hsiung Lin
J. Vac. Sci. Technol. B 29, 021011 (2011) (5 pages)
Abstract Full Text: [ Read Online (HTML) PDF (131 kB) ] Order | | | | SiN membranes with submicrometer hole arrays patterned by wafer-scale nanosphere lithography
Mona J. K. Klein, Franck Montagne, Nicolas Blondiaux, Oscar Vazquez-Mena, Harry Heinzelmann, Raphael Pugin, Juergen Brugger, and Veronica Savu
J. Vac. Sci. Technol. B 29, 021012 (2011) (5 pages)
Abstract Full Text: [ Read Online (HTML) PDF (442 kB) ] Order | | | | Fabrication of metal nanowires by ion-beam irradiation of oxides through high aspect ratio resist masks
B. A. Gurovich, K. E. Prikhod'ko, A. N. Taldenkov, N. K. Chumakov, G. E. Fedorov, A. Yu. Yakubovsky, and A. L. Bogdanov
J. Vac. Sci. Technol. B 29, 021013 (2011) (5 pages)
Abstract Full Text: [ Read Online (HTML) PDF (541 kB) ] Order | | | | Silicon nanostructure solar cells with excellent photon harvesting
Chen Chen, Rui Jia, Huihui Yue, Haofeng Li, Xinyu Liu, Tianchun Ye, Seiya Kasai, Hashizume Tamotsu, Nanjian Wu, Shanli Wang, Junhao Chu, and Bingshe Xu
J. Vac. Sci. Technol. B 29, 021014 (2011) (6 pages)
Abstract Full Text: [ Read Online (HTML) PDF (544 kB) ] Order | | | | UV-based nanoimprinting lithography with a fluorinated flexible stamp
Zhendong Zhu, Qunqing Li, Lihui Zhang, Mo Chen, and Shoushan Fan
J. Vac. Sci. Technol. B 29, 021015 (2011) (6 pages)
Abstract Full Text: [ Read Online (HTML) PDF (529 kB) ] Order | | | | Formation of 10-µm-level patterned organic thin film using microthermal evaporation
Jun Hee Choi, Andrei Zoulkarneev, Tae Yong Noh, Young Gu Lee, Sun Il Kim, Sung Soo Park, Chan Wook Baik, Byoung Lyong Choi, Miyoung Kim, Gyu-Chul Yi, and Jong Min Kim
J. Vac. Sci. Technol. B 29, 021016 (2011) (4 pages)
Abstract Full Text: [ Read Online (HTML) PDF (653 kB) ] Order | | | | Determination of the energy states of the donor acceptor decay emission in silicon rich oxide prepared by low-pressure chemical vapor deposition
R. López-Estopier, M. Aceves-Mijares, Z. Yu, and C. Falcony
J. Vac. Sci. Technol. B 29, 021017 (2011) (5 pages)
Abstract Full Text: [ Read Online (HTML) PDF (148 kB) ] Order | | | | Formation of silicon nanocrystals embedded in high- dielectric HfO2 and their application for charge storage
Weilong Li, Rui Jia, Chen Chen, Haofeng Li, Xinyu Liu, Huihui Yue, Wuchang Ding, Tianchun Ye, Seiya Kasai, Tamotsu Hashizume, Nanjian Wu, and Bingshe Xu
J. Vac. Sci. Technol. B 29, 021018 (2011) (6 pages)
Abstract Full Text: [ Read Online (HTML) PDF (832 kB) ] Order | | | | Novel approach for the synthesis of rutile titania nanotubes at very low temperature
Hyung-Kee Seo, C. Michael Elliott, Hyung-Shik Shin, and Eun-Kyung Suh
J. Vac. Sci. Technol. B 29, 021019 (2011) (4 pages)
Abstract Full Text: [ Read Online (HTML) PDF (421 kB) ] Order | | | | Direct patterning of coplanar polyethylene glycol alkylsilane monolayers by deep-ultraviolet photolithography as a general method for high fidelity, long-term cell patterning and culture
Kerry Wilson, Maria Stancescu, Mainak Das, John Rumsey, and James Hickman
J. Vac. Sci. Technol. B 29, 021020 (2011) (10 pages)
Abstract Full Text: [ Read Online (HTML) PDF (919 kB) ] Order | | | | Field-plate design for edge termination in silicon carbide high-power Schottky diodes
S. Noor Mohammad, Francis J. Kub, and Charles R. Eddy, Jr.
J. Vac. Sci. Technol. B 29, 021021 (2011) (16 pages)
Abstract Full Text: [ Read Online (HTML) PDF (828 kB) ] Order | Electronic & Optoelectronic Materials, Devices & Processing | | Effects of InGaN/GaN superlattice absorption layers on the structural and optical properties of InGaN solar cells
Chia-Lung Tsai, Gong-Cheng Fan, and Yu-Sheng Lee
J. Vac. Sci. Technol. B 29, 021201 (2011) (5 pages)
Abstract Full Text: [ Read Online (HTML) PDF (280 kB) ] Order | | | | E-beam invasiveness on 65 nm complementary metal-oxide semiconductor circuitry
Yuval Greenzweig, Yariv Drezner, Amir Raveh, Oleg Sidorov, and Richard H. Livengood
J. Vac. Sci. Technol. B 29, 021202 (2011) (5 pages)
Abstract Full Text: [ Read Online (HTML) PDF (396 kB) ] Order | | | | Effects of channel dimensions on performance of a-InGaZnO4 thin-film transistors
Young-Woo Heo, Kwang-Min Cho, Sang-Yun Sun, Se-Yun Kim, Joon-Hyung Lee, Jeong-Joo Kim, D. P. Norton, and S. J. Pearton
J. Vac. Sci. Technol. B 29, 021203 (2011) (7 pages)
Abstract Full Text: [ Read Online (HTML) PDF (1262 kB) ] Order | | | | Rapid fabrication of bilayer graphene devices using direct laser writing photolithography
J. A. Leon, E. S. Alves, D. C. Elias, J. C. Brant, T. C. Barbosa, L. M. Malard, M. A. Pimenta, G. M. Ribeiro, and F. Plentz
J. Vac. Sci. Technol. B 29, 021204 (2011) (7 pages)
Abstract Full Text: [ Read Online (HTML) PDF (498 kB) ] Order | | | | Photonic crystal structures with ultrahigh aspect ratio in lithium niobate fabricated by focused ion beam milling
Guangyuan Si, Aaron J. Danner, Siew Lang Teo, Ee Jin Teo, Jinghua Teng, and Andrew A. Bettiol
J. Vac. Sci. Technol. B 29, 021205 (2011) (5 pages)
Abstract Full Text: [ Read Online (HTML) PDF (587 kB) ] Order | | | | Growth model for plasma-assisted molecular beam epitaxy of N-polar and Ga-polar InxGa1−xN
Digbijoy N. Nath, Emre Gür, Steven A. Ringel, and Siddharth Rajan
J. Vac. Sci. Technol. B 29, 021206 (2011) (7 pages)
Abstract Full Text: [ Read Online (HTML) PDF (741 kB) ] Order | | | | Strong enhancement of ultraviolet emission from ZnO films by V implantation
Chang Oh Kim, Dong Hee Shin, Suk-Ho Choi, K. Belay, and R. G. Elliman
J. Vac. Sci. Technol. B 29, 021207 (2011) (4 pages)
Abstract Full Text: [ Read Online (HTML) PDF (385 kB) ] Order | | | | Impacts of anisotropic tilt mosaics of state-of-the-art m-plane freestanding GaN substrates on the structural and luminescent properties of m-plane AlxGa1−xN epilayers
K. Hazu, M. Kagaya, T. Hoshi, T. Onuma, and S. F. Chichibu
J. Vac. Sci. Technol. B 29, 021208 (2011) (9 pages)
Abstract Full Text: [ Read Online (HTML) PDF (617 kB) ] Order | | | | Mechanism of VFB/VTH shift in Dysprosium incorporated HfO2 gate dielectric n-Type Metal-Oxide-Semiconductor devices
Tackhwi Lee, Kisik Choi, Takashi Ando, Dae-Gyu Park, Michael A. Gribelyuk, Unoh Kwon, and Sanjay K. Banerjee
J. Vac. Sci. Technol. B 29, 021209 (2011) (7 pages)
Abstract Full Text: [ Read Online (HTML) PDF (749 kB) ] Order | Energy Conversion and Storage Devices | | Seal and encapsulate cavities for complementary metal-oxide-semiconductor microelectromechanical system thermoelectric power generators
Jin Xie, Chengkuo Lee, Ming-Fang Wang, and Hanhua Feng
J. Vac. Sci. Technol. B 29, 021401 (2011) (6 pages)
Abstract Full Text: [ Read Online (HTML) PDF (954 kB) ] Order | Lithography | | Increased pattern transfer fidelity of ZEP 520A during reactive ion etching through chemical modifications by additional dosing of the electron beam resist
David A. Czaplewski and Leonidas E. Ocola
J. Vac. Sci. Technol. B 29, 021601 (2011) (7 pages)
Abstract Full Text: [ Read Online (HTML) PDF (942 kB) ] Order | | | | High-quality global hydrogen silsequioxane contact planarization for nanoimprint lithography
Serkan Büyükköse, Boris Vratzov, and Wilfred G. van der Wiel
J. Vac. Sci. Technol. B 29, 021602 (2011) (6 pages)
Abstract Full Text: [ Read Online (HTML) PDF (871 kB) ] Order | | | | Pressureless nanoimprinting of anatase TiO2 precursor films
Dustin A. Richmond, Qifeng Zhang, Guozhong Cao, and Dirk N. Weiss
J. Vac. Sci. Technol. B 29, 021603 (2011) (5 pages)
Abstract Full Text: [ Read Online (HTML) PDF (334 kB) ] Order | | | | Enhanced resolution and groove-width simulation in cold development of ZEP520A
Takeru Okada (岡田健見), Jiro Fujimori (藤森二郎), Makoto Aida (会田真), Megumi Fujimura (藤村恵), Tatsuya Yoshizawa (吉澤達矢), Masahiro Katsumura (勝村昌広), and Tetsuya Iida (飯田哲哉)
J. Vac. Sci. Technol. B 29, 021604 (2011) (5 pages)
Abstract Full Text: [ Read Online (HTML) PDF (230 kB) ] Order | Nanometer Science & Technology | | Formation of single-domain homogeneous Au nanoparticle monolayer at the water/oil interface and its application to surface-enhanced Raman scattering
Su Il Kim, Fabien Pradal, Hyunjoon Song, and Sehun Kim
J. Vac. Sci. Technol. B 29, 021801 (2011) (5 pages)
Abstract Full Text: [ Read Online (HTML) PDF (385 kB) ] Order | | | | Image potential of C60: A density functional theory calculation
Haiming Huang, Zhibing Li, Weiliang Wang, and Guihua Chen
J. Vac. Sci. Technol. B 29, 021802 (2011) (5 pages)
Abstract Full Text: [ Read Online (HTML) PDF (368 kB) ] Order | | | | Exact solutions for the field electron emission achieved from a flat metal using the standard Fowler–Nordheim equation with a correction factor that accounts for the electric field, the work function, and the Fermi energy of the emitter
A. Mayer
J. Vac. Sci. Technol. B 29, 021803 (2011) (7 pages)
Abstract Full Text: [ Read Online (HTML) PDF (186 kB) ] Order | Microelectronic & Nanoelectronic Devices | | Electrical and structural properties of ultrathin SiON films on Si prepared by plasma nitridation
E. Hourdakis, A. G. Nassiopoulou, A. Parisini, M. A. Reading, J. A. van den Berg, L. Sygellou, S. Ladas, P. Petrik, A. Nutsch, M. Wolf, and G. Roeder
J. Vac. Sci. Technol. B 29, 022201 (2011) (9 pages)
Abstract Full Text: [ Read Online (HTML) PDF (478 kB) ] Order | Organic Electronics and Optoelectronics | | Laboratory pentacene and parylene evaporation systems for fabricating organic thin film devices
Zhang Jia, Vincent W. Lee, Yu-Jen Hsu, and Ioannis Kymissis
J. Vac. Sci. Technol. B 29, 022401 (2011) (5 pages)
Abstract Full Text: [ Read Online (HTML) PDF (228 kB) ] Order | Brief Reports and Comments | | Photocapacitance spectroscopy study of deep-level defects in freestanding n-GaN substrates using transparent conductive polymer Schottky contacts
Yoshitaka Nakano, Mickael Lozac'h, Nobuyuki Matsuki, Kazuaki Sakoda, and Masatomo Sumiya
J. Vac. Sci. Technol. B 29, 023001 (2011) (4 pages)
Abstract Full Text: [ Read Online (HTML) PDF (288 kB) ] Order | 23rd International Vacuum Nanoelectronics Conference | | Space charge, emittance, trajectories, and the modeling of field emitter arrays
Kevin L. Jensen
J. Vac. Sci. Technol. B 29, 02B101 (2011) (7 pages)
Abstract Full Text: [ Read Online (HTML) PDF (579 kB) ] Order | | | | Evaluation of a simplified simulation approach for thin film type gated field emitters
Jie Luo, Jun Chen, S. Z. Deng, and N. S. Xu
J. Vac. Sci. Technol. B 29, 02B102 (2011) (5 pages)
Abstract Full Text: [ Read Online (HTML) PDF (570 kB) ] Order | | | | Electron field emission from a gold tip under laser irradiation at the plasmon-resonant wavelength
Kentaro Iwami, Arata Iizuka, and Norihiro Umeda
J. Vac. Sci. Technol. B 29, 02B103 (2011) (5 pages)
Abstract Full Text: [ Read Online (HTML) PDF (183 kB) ] Order | | | | Visible-light induced electron emission from carbon nanotube forests
Parham Yaghoobi, Mehran Vahdani Moghaddam, Mario Michan, and Alireza Nojeh
J. Vac. Sci. Technol. B 29, 02B104 (2011) (4 pages)
Abstract Full Text: [ Read Online (HTML) PDF (168 kB) ] Order | | | | Electronic and field emission properties of two-dimensional nanotori
Marina Rucsandra Filip and Lucian Dragoş Filip
J. Vac. Sci. Technol. B 29, 02B105 (2011) (6 pages)
Abstract Full Text: [ Read Online (HTML) PDF (363 kB) ] Order | | | | Pronounced field emission from vertically aligned carbon nanotube blocks and bundles
Oktay Yilmazoglu, Ravi Joshi, Alexander Popp, Dimitris Pavlidis, and Jörg J. Schneider
J. Vac. Sci. Technol. B 29, 02B106 (2011) (5 pages)
Abstract Full Text: [ Read Online (HTML) PDF (392 kB) ] Order | | | | Development of a compact neutron source based on field ionization processes
Arun Persaud, Ian Allen, Michael R. Dickinson, Thomas Schenkel, Rehan Kapadia, Kuniharu Takei, and Ali Javey
J. Vac. Sci. Technol. B 29, 02B107 (2011) (4 pages)
Abstract Full Text: [ Read Online (HTML) PDF (353 kB) ] Order | | | | High-performance field-emission electron gun using a reticulated vitreous carbon cathode
Brady C. Smith, Charles E. Hunt, Ivor Brodie, and Arthur C. Carpenter
J. Vac. Sci. Technol. B 29, 02B108 (2011) (5 pages)
Abstract Full Text: [ Read Online (HTML) PDF (227 kB) ] Order | | | | Faceted magnetron concept using field emission cathodes
Jim Browning and Jack Watrous
J. Vac. Sci. Technol. B 29, 02B109 (2011) (7 pages)
Abstract Full Text: [ Read Online (HTML) PDF (696 kB) ] Order | | | | Effect of ultraviolet light irradiation on electron field emission from titanium-oxide nanostructures
F. Wakaya, T. Tatsumi, K. Murakami, S. Abo, M. Takai, T. Takimoto, and Y. Takaoka
J. Vac. Sci. Technol. B 29, 02B110 (2011) (4 pages)
Abstract Full Text: [ Read Online (HTML) PDF (413 kB) ] Order | | | | Field effect controlled lateral field emission triode
John Palma and Samson Mil'shtein
J. Vac. Sci. Technol. B 29, 02B111 (2011) (4 pages)
Abstract Full Text: [ Read Online (HTML) PDF (378 kB) ] Order | | | | Suitability of low-work-function titanium nitride coated transfer mold field-emitter arrays for harsh environment applications
Masayuki Nakamoto and Jonghyun Moon
J. Vac. Sci. Technol. B 29, 02B112 (2011) (5 pages)
Abstract Full Text: [ Read Online (HTML) PDF (642 kB) ] Order | | | | Analysis and simulation of generating terahertz surface waves on a tapered field emission tip
Mark J. Hagmann, Gagan Kumar, Shashank Pandey, and Ajay Nahata
J. Vac. Sci. Technol. B 29, 02B113 (2011) (6 pages)
Abstract Full Text: [ Read Online (HTML) PDF (171 kB) ] Order | | | |
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