| Development of ion sources from ionic liquids for microfabrication Carla Perez-Martinez, Stéphane Guilet, Noëlle Gogneau, Pascale Jegou, Jacques Gierak, and Paulo Lozano pp. L25-L27 Abstract Full Text: [ HTML Sectioned HTML PDF (238 kB) ] Order | Regular Articles | | Method to obtain nonuniformity information from field emission behavior Fernando F. Dall'Agnol, Alexandre C. de Paulo, Pablo Paredez, Daniel den Engelsen, Thebano E. A. Santos, and Victor P. Mammana pp. 441-449 Abstract Full Text: [ HTML Sectioned HTML PDF (1062 kB) ] Order | | | Effect of energetic ions on plasma damage of porous SiCOH low-k materials E. Kunnen, M. R. Baklanov, A. Franquet, D. Shamiryan, T. V. Rakhimova, A. M. Urbanowicz, H. Struyf, and W. Boullart pp. 450-459 Abstract Full Text: [ HTML Sectioned HTML PDF (889 kB) ] Order | | | Effects of the size of silicon grain on the gate-leakage current in nanocrystalline silicon thin-film transistors Ling-Feng Mao pp. 460-465 Abstract Full Text: [ HTML Sectioned HTML PDF (356 kB) ] Order | | | n-type InP Schottky diodes with organic thin layer: Electrical and interfacial properties Ö. Güllü and A. Türüt pp. 466-472 Abstract Full Text: [ HTML Sectioned HTML PDF (238 kB) ] Order | | | Effects of AlxGa1−xN interlayer for GaN epilayer grown on Si substrate by metal-organic chemical-vapor deposition Kung-Liang Lin, Edward-Yi Chang, Yu-Lin Hsiao, Wei-Ching Huang, Tien-Tung Luong, Yuen-Yee Wong, Tingkai Li, Doug Tweet, and Chen-Hao Chiang pp. 473-477 Abstract Full Text: [ HTML Sectioned HTML PDF (436 kB) ] Order | | | Mn-induced growth of InAs nanowires F. Jabeen, M. Piccin, L. Felisari, V. Grillo, G. Bais, S. Rubini, F. Martelli, F. d'Acapito, M. Rovezzi, and F. Boscherini pp. 478-483 Abstract Full Text: [ HTML Sectioned HTML PDF (553 kB) ] Order | | | Direct transfer of gold nanoislands from a MoS2 stamp to a Si–H surface Jie Deng, Cedric Troadec, Hui Kim Hui, and Christian Joachim pp. 484-489 Abstract Full Text: [ HTML Sectioned HTML PDF (581 kB) ] Order | | | Cathodoluminescent properties of nanocrystalline Lu3Ga5O12:Tb3+ phosphor for field emission display application X. G. Xu, Jun Chen, S. Z. Deng, N. S. Xu, and J. Lin pp. 490-494 Abstract Full Text: [ HTML Sectioned HTML PDF (548 kB) ] Order | | | Cesium and oxygen activated amorphous silicon germanium photocathodes for photoinjectors G. A. Mulhollan and J. C. Bierman pp. 495-499 Abstract Full Text: [ HTML Sectioned HTML PDF (158 kB) ] Order | | | Effects of focused MeV ion beam irradiation on the roughness of electrochemically micromachined silicon surfaces Y. S. Ow, S. Azimi, M. B. H. Breese, E. J. Teo, and D. Mangaiyarkarasi pp. 500-505 Abstract Full Text: [ HTML Sectioned HTML PDF (548 kB) ] Order | | | Field emission from N-doped diamond doped with dimethylurea Y. Kudo, Y. Sato, T. Masuzawa, T. Yamada, I. Saito, T. Yoshino, W. J. Chun, S. Yamasaki, and K. Okano pp. 506-510 Abstract Full Text: [ HTML Sectioned HTML PDF (379 kB) ] Order | | | Secondary ion mass spectrometry characterization of anomalous behavior for low dose ion implanted phosphorus in silicon C. Penley, F. A. Stevie, D. P. Griffis, S. Siebel, L. Kulig, and J. Lee pp. 511-516 Abstract Full Text: [ HTML Sectioned HTML PDF (701 kB) ] Order | | | Mechanism of ultrathin tunnel barrier failure due to mechanical-stress-induced nanosized hillocks and voids Pawan Tyagi and Bruce J. Hinds pp. 517-521 Abstract Full Text: [ HTML Sectioned HTML PDF (447 kB) ] Order | | | Aligned dense single-walled carbon nanotube beams and cantilevers for nanoelectromechanical systems applications Miao Lu, Min-Woo Jang, Stephen A. Campbell, and Tianhong Cui pp. 522-526 Abstract Full Text: [ HTML Sectioned HTML PDF (876 kB) ] Order | | | Atomic radical abatement of organic impurities from electron beam deposited metallic structures Joshua D. Wnuk, Justin M. Gorham, Samantha G. Rosenberg, Theodore E. Madey, Cornelis W. Hagen, and D. Howard Fairbrother pp. 527-537 Abstract Full Text: [ HTML Sectioned HTML PDF (593 kB) ] Order | | | Parallel fabrication of monolithic nanoscopic tunnel junctions for molecular devices R. Gupta and B. G. Willis pp. 538-544 Abstract Full Text: [ HTML Sectioned HTML PDF (587 kB) ] Order | | | X-ray photoelectron spectroscopy investigation of oxidation states in molybdenum thin films for Cu(InGa)Se2 applications Y. C. Kang, R. Khanal, J. Y. Park, R. D. Ramsier, H. Khatri, and S. Marsillac pp. 545-548 Abstract Full Text: [ HTML Sectioned HTML PDF (346 kB) ] Order | | | Fabrication of complex three-dimensional nanostructures using focused ion beam and nanomanipulation Jangbae Jeon, Herman Carlo Floresca, and M. J. Kim pp. 549-553 Abstract Full Text: [ HTML Sectioned HTML PDF (477 kB) ] Order | | | Depth profile analysis of helium in silicon with high-resolution elastic recoil detection analysis Mitsuhiro Tomita, Haruko Akutsu, Yasunori Oshima, Nobutaka Sato, Shoichi Mure, Hirofumi Fukuyama, and Chikara Ichihara pp. 554-557 Abstract Full Text: [ HTML Sectioned HTML PDF (266 kB) ] Order | | | Fabrication of gated CuO nanowire field emitter arrays for application in field emission display R. Z. Zhan, Jun Chen, S. Z. Deng, and N. S. Xu pp. 558-561 Abstract Full Text: [ HTML Sectioned HTML PDF (405 kB) ] Order | | | Nanoscale field emission in inert gas under atmospheric pressure Li Qian, Yuquan Wang, Liang Liu, and Shoushan Fan pp. 562-566 Abstract Full Text: [ HTML Sectioned HTML PDF (429 kB) ] Order | | | Effect of copper barrier dielectric deposition process on characterization of copper interconnect Yi-Lung Cheng, Tai-Jung Chiu, Bor-Jou Wei, Huan-Jung Wang, Jiung Wu, and Ying-Lang Wang pp. 567-572 Abstract Full Text: [ HTML Sectioned HTML PDF (341 kB) ] Order | | | Electrical and reliability performances of nitrogen-incorporated silicon carbide dielectric by chemical vapor deposition Yi-Lung Cheng, Shiuan-An Chen, Tai-Jung Chiu, Jiung Wu, Bor-Jou Wei, and Hung-Jui Chang pp. 573-576 Abstract Full Text: [ HTML Sectioned HTML PDF (191 kB) ] Order | | | Effect of iodotrifluoromethane plasma for reducing ultraviolet light irradiation damage in dielectric film etching processes Yoshinari Ichihashi, Yasushi Ishikawa, Ryu Shimizu, and Seiji Samukawa pp. 577-580 Abstract Full Text: [ HTML Sectioned HTML PDF (224 kB) ] Order | | | Electron-beam exposure mechanisms in hydrogen silsesquioxane investigated by vibrational spectroscopy and in situ electron-beam-induced desorption D. L. Olynick, B. Cord, A. Schipotinin, D. F. Ogletree, and P. J. Schuck pp. 581-587 Abstract Full Text: [ HTML Sectioned HTML PDF (476 kB) ] Order | | | Damage engineering of boron-based low energy ion implantations on ultrashallow junction fabrications Shu Qin, Y. Jeff Hu, and Allen McTeer pp. 588-594 Abstract Full Text: [ HTML Sectioned HTML PDF (1207 kB) ] Order | | | Comprehensive study of focused ion beam induced lateral damage in silicon by scanning probe microscopy techniques M. Rommel, G. Spoldi, V. Yanev, S. Beuer, B. Amon, J. Jambreck, S. Petersen, A. J. Bauer, and L. Frey pp. 595-607 Abstract Full Text: [ HTML Sectioned HTML PDF (1113 kB) ] Order | | | Neutron transmutation doping effects in GaN A. Y. Polyakov, N. B. Smirnov, A. V. Govorkov, N. G. Kolin, D. I. Merkurisov, V. M. Boiko, A. V. Korulin, and S. J. Pearton pp. 608-612 Abstract Full Text: [ HTML Sectioned HTML PDF (125 kB) ] Order | | | ZnCdSe nanowires grown by molecular beam epitaxy B. W. Lan, C. H. Hsiao, S. C. Hung, S. J. Chang, S. J. Young, Y. C. Cheng, S. H. Chih, and B. R. Huang pp. 613-616 Abstract Full Text: [ HTML Sectioned HTML PDF (587 kB) ] Order | | | Submicron organic nanofiber devices with different anode-cathode materials: A simple approach Henrik Henrichsen, Heinz Sturm, Peter Bøggild, and Ole Hansen pp. 617-622 Abstract Full Text: [ HTML Sectioned HTML PDF (575 kB) ] Order | | | Correlation between structural and optical properties of a-plane GaN films grown on r-plane sapphire by metal organic chemical-vapor deposition Mina Jung, Jiho Chang, Hyunjae Lee, Jun-seok Ha, Jin-sub Park, Seungwhan Park, Katsushi Fujii, Takafumi Yao, Gyung-suk Kil, Seogwoo Lee, Myungwhan Cho, Sungmin Whang, and Yong-gon Seo pp. 623-626 Abstract Full Text: [ HTML Sectioned HTML PDF (480 kB) ] Order | | | Simulation of self-focusing electron emitter Guang Yuan, Jinjing Jiang, Chun Li, Weidong Liu, and Hitenori Mimura pp. 627-630 Abstract Full Text: [ HTML Sectioned HTML PDF (192 kB) ] Order | | | Single-crystal gold tip for tip-enhanced Raman spectroscopy D. Roy, C. M. Williams, and K. Mingard pp. 631-634 Abstract Full Text: [ HTML Sectioned HTML PDF (223 kB) ] Order | | | Removing GaAs substrate by nitric acid solution C. C. Li, B. L. Guan, D. X. Chuai, X. Guo, and G. D. Shen pp. 635-637 Abstract Full Text: [ HTML Sectioned HTML PDF (254 kB) ] Order | Brief Reports and Comments | | Fabrication of regular arrays of gold nanospheres by thermal transformation of electroless-plated films Wonmi Ahn, Phillip Blake, John Shultz, Morgan E. Ware, and D. Keith Roper pp. 638-642 Abstract Full Text: [ HTML Sectioned HTML PDF (296 kB) ] Order | Shop Notes | | Resurrecting dirty atomic force microscopy calibration standards Donald A. Chernoff and Robert Sherman pp. 643-647 Abstract Full Text: [ HTML Sectioned HTML PDF (588 kB) ] Order | Errata | | Erratum: “Experimental studies of dose retention and activation in fin field-effect-transistor-based structures” [J. Vac. Sci. Technol. B 28, C1H5 (2010)] Jay Mody, Ray Duffy, Pierre Eyben, Jozefien Goossens, Alain Moussa, Wouter Polspoel, Bart Berghmans, M. J. H. van Dal, B. J. Pawlak, M. Kaiser, R. G. R. Weemaes, and Wilfried Vandervorst p. 648 Abstract Full Text: [ HTML Sectioned HTML PDF (27 kB) ] Order | PAPERS FROM THE 26th NORTH AMERICAN CONFERENCE ON MOLECULAR BEAM EPITAXY Oxide Materials [ Next Subject | Issue Index | Top / Bottom of Page] | | High-quality molecular-beam-epitaxy-grown Ga2O3(Gd2O3) on Ge (100): Electrical and chemical characterizations R. L. Chu, T. D. Lin, L. K. Chu, M. L. Huang, C. C. Chang, M. Hong, C. A. Lin, and J. Kwo pp. C3A1-C3A4 Abstract Full Text: [ HTML Sectioned HTML PDF (450 kB) ] Order | | | Growth and structural characterization of epitaxial (La1−xLux)2O3 layers grown on Si(111) Tatsuro Watahiki, Frank Grosse, Vladimir M. Kaganer, André Proessdorf, and Wolfgang Braun pp. C3A5-C3A8 Abstract Full Text: [ HTML Sectioned HTML PDF (142 kB) ] Order | | | Passivation of InGaAs using in situ molecular beam epitaxy Al2O3/HfO2 and HfAlO/HfO2 P. Chang, W. C. Lee, M. L. Huang, Y. J. Lee, M. Hong, and J. Kwo pp. C3A9-C3A11 Abstract Full Text: [ HTML Sectioned HTML PDF (305 kB) ] Order | | | Growth, characterization, and uniformity analysis of 200 mm wafer-scale SrTiO3/Si X. Gu, D. Lubyshev, J. Batzel, J. M. Fastenau, W. K. Liu, R. Pelzel, J. F. Magana, Q. Ma, and V. R. Rao pp. C3A12-C3A16 Abstract Full Text: [ HTML Sectioned HTML PDF (478 kB) ] Order | | | Lattice strain and in situ chemical depth profiling of nanometer-thick molecular beam epitaxy grown Y2O3 epitaxial films on Si (111) Y. J. Lee, W. C. Lee, M. L. Huang, S. Y. Wu, C. W. Nieh, M. Hong, J. Kwo, and C.-H. Hsu pp. C3A17-C3A19 Abstract Full Text: [ HTML Sectioned HTML PDF (260 kB) ] Order | | | Structural analysis of thin epitaxial Y2O3 films on sapphire S. E. Webster, R. Kumaran, S. Penson, and T. Tiedje pp. C3A20-C3A23 Abstract Full Text: [ HTML Sectioned HTML PDF (321 kB) ] Order | Nitrides and Diluted Nitrides [ Previous / Next Subject | Issue Index | Top / Bottom of Page] | | Molecular beam epitaxy as a method for the growth of freestanding zinc-blende (cubic) GaN layers and substrates S. V. Novikov, N. Zainal, A. V. Akimov, C. R. Staddon, A. J. Kent, and C. T. Foxon pp. C3B1-C3B6 Abstract Full Text: [ HTML Sectioned HTML PDF (237 kB) ] Order | | | Optimization of the structural and optical quality of InN nanowires on Si(111) by molecular beam epitaxy Y.-L. Chang, F. Li, and Z. Mi pp. C3B7-C3B11 Abstract Full Text: [ HTML Sectioned HTML PDF (381 kB) ] Order | | | Molecular beam epitaxy of GaNAs alloys with high As content for potential photoanode applications in hydrogen production S. V. Novikov, C. R. Staddon, C. T. Foxon, K. M. Yu, R. Broesler, M. Hawkridge, Z. Liliental-Weber, W. Walukiewicz, J. Denlinger, and I. Demchenko pp. C3B12-C3B16 Abstract Full Text: [ HTML Sectioned HTML PDF (989 kB) ] Order | | | Broadening of intersubband transitions in InGaN/AlInN multiquantum wells G. Cywiński, M. Gadysiewicz, R. Kudrawiec, M. Kryśko, A. Feduniewicz-Żmuda, M. Siekacz, M. Sawicka, P. Wolny, J. Smalc-Koziorowska, L. Nevou, M. Tchernycheva, F. H. Julien, J. Misiewicz, and C. Skierbiszewski pp. C3B17-C3B21 Abstract Full Text: [ HTML Sectioned HTML PDF (505 kB) ] Order | | | Growth and luminescence characterization of dilute InPN alloys grown by molecular beam epitaxy K. Umeno, Y. Furukawa, N. Urakami, S. Mitsuyoshi, H. Yonezu, A. Wakahara, F. Ishikawa, and M. Kondow pp. C3B22-C3B26 Abstract Full Text: [ HTML Sectioned HTML PDF (177 kB) ] Order | III-V Low Dimensional Structures [ Previous / Next Subject | Issue Index | Top / Bottom of Page] | | Strongly correlated tot=1 state in an intrinsically density-matched electron bilayer system and its two-terminal resistance S. Schmult, L. Tiemann, W. Dietsche, and K. von Klitzing pp. C3C1-C3C3 Abstract Full Text: [ HTML Sectioned HTML PDF (225 kB) ] Order | | | Highly stacked InGaAs quantum dot structures grown with two species of As Takeyoshi Sugaya, Takeru Amano, Masahiko Mori, and Shigeru Niki pp. C3C4-C3C8 Abstract Full Text: [ HTML Sectioned HTML PDF (317 kB) ] Order | | | High-optical-quality nanosphere lithographically formed InGaAs quantum dots using molecular beam epitaxy assisted GaAs mass transport and overgrowth Xifeng Qian, Shivashankar Vangala, Daniel Wasserman, and William D. Goodhue pp. C3C9-C3C14 Abstract Full Text: [ HTML Sectioned HTML PDF (454 kB) ] Order | | | Photoluminescence and photoreflectance studies of InAs self-assembled nanostructures on GaAs(631) substrates G. Garcia-Liñan, E. Cruz-Hernández, D. Vázquez-Cortes, E. López-Luna, V. H. Méndez-García, M. López-López, J. Hernandez-Rosas, and L. Zamora-Peredo pp. C3C15-C3C18 Abstract Full Text: [ HTML Sectioned HTML PDF (244 kB) ] Order | | | Optical and electrical quality improvements of undoped InAs/GaSb superlattices H. J. Haugan, B. Ullrich, L. Grazulis, S. Elhamri, G. J. Brown, and W. C. Mitchel pp. C3C19-C3C24 Abstract Full Text: [ HTML Sectioned HTML PDF (462 kB) ] Order | | | Molecular beam epitaxy and characterization of InGaAs/AlAs/AlAsSb coupled double quantum wells with extremely thin coupling barriers T. Mozume and S. Gozu pp. C3C25-C3C28 Abstract Full Text: [ HTML Sectioned HTML PDF (299 kB) ] Order | | | Hole mobility in pseudomorphic InGaSb quantum well modulation doped with carbon Chichih Liao and K. Y. Cheng pp. C3C29-C3C32 Abstract Full Text: [ HTML Sectioned HTML PDF (275 kB) ] Order | | | Study of the driving force for the self-assembly of heterojunction quantum dots (zero D molecules) using finite element analysis K. G. Eyink, L. Grazulis, M. Twyman, and K. Mahalingam pp. C3C33-C3C36 Abstract Full Text: [ HTML Sectioned HTML PDF (455 kB) ] Order | | | Molecular-beam epitaxy growth of site-controlled InAs/GaAs quantum dots defined by soft photocurable nanoimprint lithography Chien-Chia Cheng, K. Meneou, and K. Y. Cheng pp. C3C37-C3C40 Abstract Full Text: [ HTML Sectioned HTML PDF (240 kB) ] Order | II-VI Semiconductors [ Previous / Next Subject | Issue Index | Top / Bottom of Page] | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | |