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Table of Contents Alert for Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures


Journal of Vacuum Science & Technology B (Microelectronics and Nanometer Structures)

July 2009

Volume 27, Issue 4 , pp. L11-2070

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  • Letters
  • Regular Articles
  • Shop Notes
  • PAPERS FROM THE 36th ANNUAL CONFERENCE ON THE PHYSICS AND CHEMISTRY OF SEMICONDUCTOR INTERFACES (PCSI)
  • Letters

  • Characterization of 5  MeV proton-irradiated gallium nitride nanowires
    H.-Y. Kim, J. Ahn, M. A. Mastro, C. R. Eddy, Jr., J. Han, T. Yang, and J. Kim
    pp. L11-L13

    Abstract    Full Text: [ HTML Sectioned HTML   PDF (177 kB)  ]    Order
  • Energetic deposition of 10B on high aspect ratio trenches for neutron detectors
    C. C. Klepper, O. R. Monteiro, E. P. Carlson, and M. D. Keitz
    pp. L14-L17

    Abstract    Full Text: [ HTML Sectioned HTML   PDF (280 kB)  ]    Order
  • Sub-10-nm nanolithography with a scanning helium beam
    Vadim Sidorkin, Emile van Veldhoven, Emile van der Drift, Paul Alkemade, Huub Salemink, and Diederik Maas
    pp. L18-L20

    Abstract    Full Text: [ HTML Sectioned HTML   PDF (290 kB)  ]    Order
  • Regular Articles

  • Fabrication of high quality factor photonic crystal microcavities in InAsP/InP membranes combining reactive ion beam etching and reactive ion etching
    L. J. Martínez, I. Prieto, B. Alén, and P. A. Postigo
    pp. 1801-1804

    Abstract    Full Text: [ HTML Sectioned HTML   PDF (589 kB)  ]    Order
  • Nondestructive nanoscale profile measurement on two-dimensional photonic crystal structure using differential confocal microscopy
    Wen-Chuan Kuo, Fu-Jay Juang, Hong-Ren Su, and Mei-Li Hsieh
    pp. 1805-1808

    Abstract    Full Text: [ HTML Sectioned HTML   PDF (467 kB)  ]    Order
  • Dry etch selectivity of a-C:H hardmasks for sub-65  nm patterning applications
    D. Padhi, B. H. Kim, and D. Witty
    pp. 1809-1812

    Abstract    Full Text: [ HTML Sectioned HTML   PDF (331 kB)  ]    Order
  • Fabrication of all-metal field emitter arrays with controlled apex sizes by molding
    E. Kirk, S. Tsujino, T. Vogel, K. Jefimovs, J. Gobrecht, and A. Wrulich
    pp. 1813-1820

    Abstract    Full Text: [ HTML Sectioned HTML   PDF (637 kB)  ]    Order
  • Design and fabrication of surface acoustic wave delay line for surface acoustic wave chemical-agent sensors
    Yigui Zhao, Ming Liu, Jingjing Li, Jiebin Niu, and Dongmei Li
    pp. 1821-1824

    Abstract    Full Text: [ HTML Sectioned HTML   PDF (368 kB)  ]    Order
  • Method for measuring solvent permeation through polymer film on porous dielectric films
    Robert D. Geil, Jay J. Senkevich, and Bridget R. Rogers
    pp. 1825-1828

    Abstract    Full Text: [ HTML Sectioned HTML   PDF (232 kB)  ]    Order
  • Well-aligned TiO2 nanofibers grown by near-field-electrospinning
    M. Rinaldi, F. Ruggieri, L. Lozzi, and S. Santucci
    pp. 1829-1833

    Abstract    Full Text: [ HTML Sectioned HTML   PDF (553 kB)  ]    Order
  • X-ray photoelectron spectroscopy characterization of aminosilane anchored to ZnO nanorod arrays grown by an aqueous solution method with microwave-assisted heating
    K. Ogata, K. Koike, S. Sasa, M. Inoue, and M. Yano
    pp. 1834-1837

    Abstract    Full Text: [ HTML Sectioned HTML   PDF (332 kB)  ]    Order
  • Proximity effect in ion-beam-induced deposition of nanopillars
    Ping Chen, Huub W. M. Salemink, and Paul F. A. Alkemade
    pp. 1838-1843

    Abstract    Full Text: [ HTML Sectioned HTML   PDF (459 kB)  ]    Order
  • Deconvolution analyses of secondary ion mass spectrometry shallow depth profiles with depth resolution functions from silicon substrate-based delta-doped samples
    Mitsuhiro Tomita, Hiroki Tanaka, Mitsuo Koike, Shiro Takeno, Yutaro Hori, and Mamoru Takahashi
    pp. 1844-1850

    Abstract    Full Text: [ HTML Sectioned HTML   PDF (699 kB)  ]    Order
  • Investigation of etching two-dimensional microhole lattice array on lithium niobate with focused ion beam for fabricating photonic crystals
    Xuefeng Xu, Sha Yan, Jianming Xue, Yugang Wang, Keming Wang, and Xuelin Wang
    pp. 1851-1855

    Abstract    Full Text: [ HTML Sectioned HTML   PDF (417 kB)  ]    Order
  • Fabrication of ZnO nanorods by pulsed Nd:YAG laser ablation deposition
    Yiqun Shen, Ning Xu, Jushui Lai, Jian Sun, Jiada Wu, Zhifeng Ying, and Tatsuo Okada
    pp. 1856-1860

    Abstract    Full Text: [ HTML Sectioned HTML   PDF (569 kB)  ]    Order
  • Lift-off process using bilayer ultraviolet nanoimprint lithography and methacryloxypropyl-terminated-polydimethylsiloxane-based imprint resin
    Ho Yong Jung, Seon Yong Hwang, Byeong Ju Bae, and Heon Lee
    pp. 1861-1864

    Abstract    Full Text: [ HTML Sectioned HTML   PDF (520 kB)  ]    Order
  • Ideal SiC Schottky barrier diodes fabricated using refractory metal borides
    T. N. Oder, E. Sutphin, and R. Kummari
    pp. 1865-1869

    Abstract    Full Text: [ HTML Sectioned HTML   PDF (325 kB)  ]    Order
  • Electrical properties of nanoscale Au contacts on 4H-SiC
    Sang Youn Han, Jong-Lam Lee, and S. J. Pearton
    pp. 1870-1873

    Abstract    Full Text: [ HTML Sectioned HTML   PDF (306 kB)  ]    Order
  • Scanning tunneling microscope–cathodoluminescence measurement of the GaAs/AlGaAs heterostructure
    Kentaro Watanabe, Yoshiaki Nakamura, Masakazu Ichikawa, Shigeyuki Kuboya, Ryuji Katayama, and Kentaro Onabe
    pp. 1874-1880

    Abstract    Full Text: [ HTML Sectioned HTML   PDF (654 kB)  ]    Order
  • Violet light-emitting diodes grown on crack-free AlGaN templates
    Tong-Wen Wang, Nie-Chuan Chen, Wei-Chieh Lien, Meng-Chyi Wu, and Chuan-Feng Shih
    pp. 1881-1885

    Abstract    Full Text: [ HTML Sectioned HTML   PDF (738 kB)  ]    Order
  • Fabrication of Si-based two-dimensional photonic quasicrystals by using multiple-exposure holographic lithography
    Jong-Bin Yeo, Sang-Don Yun, Nam-Hoon Kim, and Hyun-Yong Lee
    pp. 1886-1889

    Abstract    Full Text: [ HTML Sectioned HTML   PDF (694 kB)  ]    Order
  • Online detection system of microtarget assembly
    Zurong Qiu, Ting Wang, Jinjiang Wang, Xinghua Li, and Ying Zhong
    pp. 1890-1896

    Abstract    Full Text: [ HTML Sectioned HTML   PDF (565 kB)  ]    Order
  • p-type behavior of nitrogen doped, lithium doped, and nitrogen-lithium codoped Zn0.11Mg0.89O thin films
    M. X. Qiu, X. Q. Gu, Z. Z. Ye, J. G. Lu, H. P. He, Y. Z. Zhang, and B. H. Zhao
    pp. 1897-1900

    Abstract    Full Text: [ HTML Sectioned HTML   PDF (301 kB)  ]    Order
  • Light enhancement of Al nanoclusters embedded in Al-doped ZnO films of GaN-based light-emitting diodes
    Ching-Ting Lee, Ying-Hung Chou, Jheng-Tai Yan, and Hsin-Ying Lee
    pp. 1901-1903

    Abstract    Full Text: [ HTML Sectioned HTML   PDF (284 kB)  ]    Order
  • n-type, p-type and semi-insulating ZnO:N thin film growth by metal organic chemical vapor deposition with NH3 doping
    Tahir Zaidi, Andrew Melton, William E. Fenwick, and Ian Ferguson
    pp. 1904-1908

    Abstract    Full Text: [ HTML Sectioned HTML   PDF (644 kB)  ]    Order
  • Inductively coupled plasma etching of GaAs suspended photonic crystal cavities
    R. Braive, L. Le Gratiet, S. Guilet, G. Patriarche, A. Lemaître, A. Beveratos, I. Robert-Philip, and I. Sagnes
    pp. 1909-1914

    Abstract    Full Text: [ HTML Sectioned HTML   PDF (406 kB)  ]    Order
  • Enhanced resolution of poly(methyl methacrylate) electron resist by thermal processing
    Nima Arjmandi, Liesbet Lagae, and Gustaaf Borghs
    pp. 1915-1918

    Abstract    Full Text: [ HTML Sectioned HTML   PDF (685 kB)  ]    Order
  • Chemical effect of dry and wet cleaning of the Ru protective layer of the extreme ultraviolet lithography reflector
    Leonid Belau, Jeong Y. Park, Ted Liang, Hyungtak Seo, and Gabor A. Somorjai
    pp. 1919-1925

    Abstract    Full Text: [ HTML Sectioned HTML   PDF (622 kB)  ]    Order
  • Feature filling modeling for step and flash imprint lithography
    Siddharth Chauhan, Frank Palmieri, Roger T. Bonnecaze, and C. Grant Willson
    pp. 1926-1932

    Abstract    Full Text: [ HTML Sectioned HTML   PDF (670 kB)  ]    Order
  • Dependence of local structural and electrical properties of nitride doped zinc oxide films on growth temperature
    Sy-Hann Chen, Chang-Feng Yu, Yen-Ju Liu, Tzu-Jen Lin, and Ya-Chi Li
    pp. 1933-1937

    Abstract    Full Text: [ HTML Sectioned HTML   PDF (950 kB)  ]    Order
  • Evaluation of extreme-ultraviolet lithography mask absorber pattern on multilayer phase defect using extreme-ultraviolet microscope
    K. Hamamoto, N. Sakaya, M. Hosoya, M. Kureishi, R. Ohkubo, T. Shoki, O. Nagarekawa, J. Kishimoto, T. Watanabe, and H. Kinoshita
    pp. 1938-1942

    Abstract    Full Text: [ HTML Sectioned HTML   PDF (813 kB)  ]    Order
  • Effects of nitrogen doping of ZnO during or after deposition
    Tingfang Yen, Michael DiNezza, Alan Haungs, Sung Jin Kim, Wayne A. Anderson, and Alexander N. Cartwright
    pp. 1943-1948

    Abstract    Full Text: [ HTML Sectioned HTML   PDF (376 kB)  ]    Order
  • Patterning of alkanethiolate self-assembled monolayers by downstream microwave nitrogen plasma: Negative and positive resist behavior
    Chih-Chiang Weng, Jiunn-Der Liao, Yi-Te Wu, Shih-Chun Tsai, Chia-Hao Chen, and Michael Zharnikov
    pp. 1949-1957

    Abstract    Full Text: [ HTML Sectioned HTML   PDF (1262 kB)  ]    Order
  • Micropatterning of polymeric semiconductor by selective lift-off method using epoxy mold
    Zhe Wang, Xinhong Yu, Rubo Xing, Yanchun Han, and Atsushi Takahara
    pp. 1958-1962

    Abstract    Full Text: [ HTML Sectioned HTML   PDF (410 kB)  ]    Order
  • Resistivity reduction by external oxidation of Cu–Mn alloy films for semiconductor interconnect application
    J. Iijima, Y. Fujii, K. Neishi, and J. Koike
    pp. 1963-1968

    Abstract    Full Text: [ HTML Sectioned HTML   PDF (433 kB)  ]    Order
  • Accumulated sidewall damage in dry etched photonic crystals
    A. Berrier, Y. Shi, J. Siegert, S. Marcinkevicius, S. He, and S. Anand
    pp. 1969-1975

    Abstract    Full Text: [ HTML Sectioned HTML   PDF (574 kB)  ]    Order
  • Analytical model for ArF photoresist shrinkage under scanning electron microscopy inspection
    Guy Ayal, David Andelman, and Yachin Cohen
    pp. 1976-1983

    Abstract    Full Text: [ HTML Sectioned HTML   PDF (191 kB)  ]    Order
  • Synthesis of silicon-containing materials for UV-curable imprint etch barrier solutions
    Sun-Sik Song, Sang-Mook Kim, Byung-Yeon Choi, Gun-Young Jung, and Heon Lee
    pp. 1984-1988

    Abstract    Full Text: [ HTML Sectioned HTML   PDF (288 kB)  ]    Order
  • Shop Notes

  • The influence of external load and air pressure on air slide table performance of ultraprecision machines in nanomachining
    Mehrdad Vahdati and Nader Vahdati
    pp. 1989-1992

    Abstract    Full Text: [ HTML Sectioned HTML   PDF (569 kB)  ]    Order
  • PAPERS FROM THE 36th ANNUAL CONFERENCE ON THE PHYSICS AND CHEMISTRY OF SEMICONDUCTOR INTERFACES (PCSI)

  • Preface
    Ben Shanabrook and Rudy Ludeke
    p. 1995

    Abstract    Full Text: [ HTML Sectioned HTML   PDF (23 kB)  ]    Order

  • Graphine and C60
    [ Next Subject | Issue Index | Top / Bottom of Page]

  • Loop formation in graphitic nanoribbon edges using furnace heating or Joule heating
    Xiaoting Jia, Jessica Campos-Delgado, Edgar Eduardo Gracia-Espino, Mario Hofmann, Hiroyuki Muramatsu, Yoong Ahm Kim, Takuya Hayashi, Morinobu Endo, Jing Kong, Mauricio Terrones, and Mildred S. Dresselhaus
    pp. 1996-2002

    Abstract    Full Text: [ HTML Sectioned HTML   PDF (802 kB)  ]    Order
  • Theory and measurements of room temperature transport in graphene using SiO2 backgate and electrochemical gate
    R. S. Shishir, F. Chen, J. Xia, N. J. Tao, and D. K. Ferry
    pp. 2003-2007

    Abstract    Full Text: [ HTML Sectioned HTML   PDF (251 kB)  ]    Order
  • Density functional theory calculations and the induced density of interface states model for noble metals/C60 interfaces
    E. Abad, J. Ortega, and F. Flores
    pp. 2008-2011

    Abstract    Full Text: [ HTML Sectioned HTML   PDF (228 kB)  ]    Order

  • Epitaxial Oxides
    [ Previous / Next Subject | Issue Index | Top / Bottom of Page]

  • Surface, bulk, and interface electronic states of epitaxial BiFeO3 films
    Jun Zhang, M. Rutkowski, L. W. Martin, T. Conry, R. Ramesh, J. F. Ihlefeld, A. Melville, D. G. Schlom, and L. J. Brillson
    pp. 2012-2014

    Abstract    Full Text: [ HTML Sectioned HTML   PDF (403 kB)  ]    Order
  • Diffraction studies of submonolayer Sr structures on the Si (001) surface
    J. W. Reiner, Y. Segal, K. F. Garrity, H. Hong, S. Ismail-Beigi, C. H. Ahn, and F. J. Walker
    pp. 2015-2019

    Abstract    Full Text: [ HTML Sectioned HTML   PDF (249 kB)  ]    Order

  • High-K Oxides
    [ Previous / Next Subject | Issue Index | Top / Bottom of Page]

  • In-plane strain effects on dielectric properties of the HfO2 thin film
    Sadakazu Wakui, Jun Nakamura, and Akiko Natori
    pp. 2020-2023

    Abstract    Full Text: [ HTML Sectioned HTML   PDF (174 kB)  ]    Order
  • In0.53Ga0.47As n-metal-oxide-semiconductor field effect transistors with atomic layer deposited Al2O3, HfO2, and LaAlO3 gate dielectrics
    Han Zhao, Jung Hwan Yum, Yen-Ting Chen, and Jack C. Lee
    pp. 2024-2027

    Abstract    Full Text: [ HTML Sectioned HTML   PDF (520 kB)  ]    Order
  • Capacitance-voltage and photoluminescence study of high-k/GaAs interfaces controlled by Si interface control layer
    Masamichi Akazawa, Alina Domanowska, Boguslawa Adamowicz, and Hideki Hasegawa
    pp. 2028-2035

    Abstract    Full Text: [ HTML Sectioned HTML   PDF (703 kB)  ]    Order

  • Electrical Contacts and Transports
    [ Previous / Next Subject | Issue Index | Top / Bottom of Page]

  • Ultralow resistance, nonalloyed Ohmic contacts to n-InGaAs
    Ashish K. Baraskar, Mark A. Wistey, Vibhor Jain, Uttam Singisetti, Greg Burek, Brian J. Thibeault, Yong Ju Lee, Arthur C. Gossard, and Mark J. W. Rodwell
    pp. 2036-2039

    Abstract    Full Text: [ HTML Sectioned HTML   PDF (313 kB)  ]    Order
  • Electrical transport in GaN nanowires grown by selective epitaxy
    A. Alec Talin, B. S. Swartzentruber, François Léonard, X. Wang, and Stephen D. Hersee
    pp. 2040-2043

    Abstract    Full Text: [ HTML Sectioned HTML   PDF (236 kB)  ]    Order
  • Hot electron transport studies of the Cu/Si(001) interface using ballistic electron emission microscopy
    J. J. Garramone, J. R. Abel, I. L. Sitnitsky, R. L. Moore, and V. P. LaBella
    pp. 2044-2047

    Abstract    Full Text: [ HTML Sectioned HTML   PDF (192 kB)  ]    Order
  • Current collapse transient behavior and its mechanism in submicron-gate AlGaN/GaN heterostructure transistors
    Hideki Hasegawa and Masamichi Akazawa
    pp. 2048-2054

    Abstract    Full Text: [ HTML Sectioned HTML   PDF (559 kB)  ]    Order

  • Plasmonics
    [ Previous / Next Subject | Issue Index | Top / Bottom of Page]

  • Plasmonic behavior of Ag/dielectric nanowires and the effect of geometry
    S. M. Prokes, D. Alexson, O. J. Glembocki, H. D. Park, and R. W. Rendell
    pp. 2055-2061

    Abstract    Full Text: [ HTML Sectioned HTML   PDF (1068 kB)  ]    Order

  • Spintronics
    [ Previous / Next Subject | Issue Index | Top / Bottom of Page]

  • Anisotropic half-metallic ground state of Mn atomic wire on GaAs(110)
    Motoi Hirayama, Akiko Natori, and Jun Nakamura
    pp. 2062-2065

    Abstract    Full Text: [ HTML Sectioned HTML   PDF (636 kB)  ]    Order
  • Molecular beam epitaxy of high mobility In0.75Ga0.25As for electron spin transport applications
    P. J. Simmonds, S. N. Holmes, H. E. Beere, I. Farrer, F. Sfigakis, D. A. Ritchie, and M. Pepper
    pp. 2066-2070

    Abstract    Full Text: [ HTML Sectioned HTML   PDF (361 kB)  ]    Order
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