Journal of Vacuum Science & Technology B (Microelectronics and Nanometer Structures)
March 2011
Volume 29, Issue 2, Articles 020601-02B120
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| L. Gatilova, S. Bouchoule, S. Guilet, and G. Patriarche J. Vac. Sci. Technol. B 29, 020601 (2011) (5 pages) Abstract Full Text: [ Read Online (HTML) PDF (366 kB) ] Order |
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| Dae-Seon Kim, Min-Su Park, and Jae-Hyung Jang J. Vac. Sci. Technol. B 29, 020602 (2011) (5 pages) Abstract Full Text: [ Read Online (HTML) PDF (554 kB) ] Order |
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| E. A. Douglas, F. Ren, and S. J. Pearton J. Vac. Sci. Technol. B 29, 020603 (2011) (4 pages) Abstract Full Text: [ Read Online (HTML) PDF (269 kB) ] Order |
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| Chang-Gyu Kim and Won-Jong Lee J. Vac. Sci. Technol. B 29, 020604 (2011) (6 pages) Abstract Full Text: [ Read Online (HTML) PDF (240 kB) ] Order |
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| A. Mazurak, J. Walczak, and B. Majkusiak J. Vac. Sci. Technol. B 29, 020605 (2011) (9 pages) Abstract Full Text: [ Read Online (HTML) PDF (581 kB) ] Order |
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| Ziguang Chen, Jiashi Yang, and Li Tan J. Vac. Sci. Technol. B 29, 021001 (2011) (5 pages) Abstract Full Text: [ Read Online (HTML) PDF (487 kB) ] Order |
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| C.-F. Lo, L. Liu, C. Y. Chang, F. Ren, V. Craciun, S. J. Pearton, Y. W. Heo, O. Laboutin, and J. W. Johnson J. Vac. Sci. Technol. B 29, 021002 (2011) (5 pages) Abstract Full Text: [ Read Online (HTML) PDF (913 kB) ] Order |
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| C. J. Tay, C. Quan, M. L. Ling, G. S. Chua, S. K. Tan, and Q. Lin J. Vac. Sci. Technol. B 29, 021003 (2011) (8 pages) Abstract Full Text: [ Read Online (HTML) PDF (424 kB) ] Order |
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| Byung-Jae Kim, Younghun Jung, Michael A. Mastro, Jennifer Hite, Neeraj Nepal, Charles R. Eddy, Jr., and Jihyun Kim J. Vac. Sci. Technol. B 29, 021004 (2011) (4 pages) Abstract Full Text: [ Read Online (HTML) PDF (318 kB) ] Order |
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| Z. H. Wu, Y. Q. Sun, J. Yin, Y.-Y Fang, J. N. Dai, C. Q. Chen, Q. Y. Wei, T. Li, K. W. Sun, A. M. Fischer, and F. A. Ponce J. Vac. Sci. Technol. B 29, 021005 (2011) (4 pages) Abstract Full Text: [ Read Online (HTML) PDF (526 kB) ] Order |
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| A. Larrue, D. Belharet, P. Dubreuil, S. Bonnefont, O. Gauthier-Lafaye, A. Monmayrant, F. Lozes-Dupuy, and S. Moumdji J. Vac. Sci. Technol. B 29, 021006 (2011) (7 pages) Abstract Full Text: [ Read Online (HTML) PDF (420 kB) ] Order |
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| Horng-Chih Lin, Tzu-I Tsai, Tien-Sheng Chao, Min-Feng Jian, and Tiao-Yuan Huang J. Vac. Sci. Technol. B 29, 021007 (2011) (7 pages) Abstract Full Text: [ Read Online (HTML) PDF (1044 kB) ] Order |
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| Ki Chang Lee, Kwang-Min Jo, Sang-Yun Sung, Joon-Hyung Lee, Jeong-Joo Kim, Byoung-Seong Jeong, S. J. Pearton, D. P. Norton, and Young-Woo Heo J. Vac. Sci. Technol. B 29, 021008 (2011) (4 pages) Abstract Full Text: [ Read Online (HTML) PDF (258 kB) ] Order |
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| Estelle Kalfon-Cohen, Ohad Goldbart, Roy Schreiber, Sidney R. Cohen, David Barlam, Tommy Lorenz, Andrey Enyashin, and Gotthard Seifert J. Vac. Sci. Technol. B 29, 021009 (2011) (8 pages) Abstract Full Text: [ Read Online (HTML) PDF (370 kB) ] Order |
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| G. Droulers, A. Beaumont, J. Beauvais, and D. Drouin J. Vac. Sci. Technol. B 29, 021010 (2011) (6 pages) Abstract Full Text: [ Read Online (HTML) PDF (307 kB) ] Order |
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| Jian-Ming Lin, Li-Chang Chou, and Hao-Hsiung Lin J. Vac. Sci. Technol. B 29, 021011 (2011) (5 pages) Abstract Full Text: [ Read Online (HTML) PDF (131 kB) ] Order |
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| Mona J. K. Klein, Franck Montagne, Nicolas Blondiaux, Oscar Vazquez-Mena, Harry Heinzelmann, Raphael Pugin, Juergen Brugger, and Veronica Savu J. Vac. Sci. Technol. B 29, 021012 (2011) (5 pages) Abstract Full Text: [ Read Online (HTML) PDF (442 kB) ] Order |
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| B. A. Gurovich, K. E. Prikhod'ko, A. N. Taldenkov, N. K. Chumakov, G. E. Fedorov, A. Yu. Yakubovsky, and A. L. Bogdanov J. Vac. Sci. Technol. B 29, 021013 (2011) (5 pages) Abstract Full Text: [ Read Online (HTML) PDF (541 kB) ] Order |
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| Chen Chen, Rui Jia, Huihui Yue, Haofeng Li, Xinyu Liu, Tianchun Ye, Seiya Kasai, Hashizume Tamotsu, Nanjian Wu, Shanli Wang, Junhao Chu, and Bingshe Xu J. Vac. Sci. Technol. B 29, 021014 (2011) (6 pages) Abstract Full Text: [ Read Online (HTML) PDF (544 kB) ] Order |
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| Zhendong Zhu, Qunqing Li, Lihui Zhang, Mo Chen, and Shoushan Fan J. Vac. Sci. Technol. B 29, 021015 (2011) (6 pages) Abstract Full Text: [ Read Online (HTML) PDF (529 kB) ] Order |
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| Jun Hee Choi, Andrei Zoulkarneev, Tae Yong Noh, Young Gu Lee, Sun Il Kim, Sung Soo Park, Chan Wook Baik, Byoung Lyong Choi, Miyoung Kim, Gyu-Chul Yi, and Jong Min Kim J. Vac. Sci. Technol. B 29, 021016 (2011) (4 pages) Abstract Full Text: [ Read Online (HTML) PDF (653 kB) ] Order |
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| R. López-Estopier, M. Aceves-Mijares, Z. Yu, and C. Falcony J. Vac. Sci. Technol. B 29, 021017 (2011) (5 pages) Abstract Full Text: [ Read Online (HTML) PDF (148 kB) ] Order |
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| Weilong Li, Rui Jia, Chen Chen, Haofeng Li, Xinyu Liu, Huihui Yue, Wuchang Ding, Tianchun Ye, Seiya Kasai, Tamotsu Hashizume, Nanjian Wu, and Bingshe Xu J. Vac. Sci. Technol. B 29, 021018 (2011) (6 pages) Abstract Full Text: [ Read Online (HTML) PDF (832 kB) ] Order |
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| Hyung-Kee Seo, C. Michael Elliott, Hyung-Shik Shin, and Eun-Kyung Suh J. Vac. Sci. Technol. B 29, 021019 (2011) (4 pages) Abstract Full Text: [ Read Online (HTML) PDF (421 kB) ] Order |
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| Kerry Wilson, Maria Stancescu, Mainak Das, John Rumsey, and James Hickman J. Vac. Sci. Technol. B 29, 021020 (2011) (10 pages) Abstract Full Text: [ Read Online (HTML) PDF (919 kB) ] Order |
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| S. Noor Mohammad, Francis J. Kub, and Charles R. Eddy, Jr. J. Vac. Sci. Technol. B 29, 021021 (2011) (16 pages) Abstract Full Text: [ Read Online (HTML) PDF (828 kB) ] Order |
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| Chia-Lung Tsai, Gong-Cheng Fan, and Yu-Sheng Lee J. Vac. Sci. Technol. B 29, 021201 (2011) (5 pages) Abstract Full Text: [ Read Online (HTML) PDF (280 kB) ] Order |
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| Yuval Greenzweig, Yariv Drezner, Amir Raveh, Oleg Sidorov, and Richard H. Livengood J. Vac. Sci. Technol. B 29, 021202 (2011) (5 pages) Abstract Full Text: [ Read Online (HTML) PDF (396 kB) ] Order |
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| Young-Woo Heo, Kwang-Min Cho, Sang-Yun Sun, Se-Yun Kim, Joon-Hyung Lee, Jeong-Joo Kim, D. P. Norton, and S. J. Pearton J. Vac. Sci. Technol. B 29, 021203 (2011) (7 pages) Abstract Full Text: [ Read Online (HTML) PDF (1262 kB) ] Order |
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| J. A. Leon, E. S. Alves, D. C. Elias, J. C. Brant, T. C. Barbosa, L. M. Malard, M. A. Pimenta, G. M. Ribeiro, and F. Plentz J. Vac. Sci. Technol. B 29, 021204 (2011) (7 pages) Abstract Full Text: [ Read Online (HTML) PDF (498 kB) ] Order |
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| Guangyuan Si, Aaron J. Danner, Siew Lang Teo, Ee Jin Teo, Jinghua Teng, and Andrew A. Bettiol J. Vac. Sci. Technol. B 29, 021205 (2011) (5 pages) Abstract Full Text: [ Read Online (HTML) PDF (587 kB) ] Order |
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| Digbijoy N. Nath, Emre Gür, Steven A. Ringel, and Siddharth Rajan J. Vac. Sci. Technol. B 29, 021206 (2011) (7 pages) Abstract Full Text: [ Read Online (HTML) PDF (741 kB) ] Order |
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| Chang Oh Kim, Dong Hee Shin, Suk-Ho Choi, K. Belay, and R. G. Elliman J. Vac. Sci. Technol. B 29, 021207 (2011) (4 pages) Abstract Full Text: [ Read Online (HTML) PDF (385 kB) ] Order |
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| K. Hazu, M. Kagaya, T. Hoshi, T. Onuma, and S. F. Chichibu J. Vac. Sci. Technol. B 29, 021208 (2011) (9 pages) Abstract Full Text: [ Read Online (HTML) PDF (617 kB) ] Order |
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| Tackhwi Lee, Kisik Choi, Takashi Ando, Dae-Gyu Park, Michael A. Gribelyuk, Unoh Kwon, and Sanjay K. Banerjee J. Vac. Sci. Technol. B 29, 021209 (2011) (7 pages) Abstract Full Text: [ Read Online (HTML) PDF (749 kB) ] Order |
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| Jin Xie, Chengkuo Lee, Ming-Fang Wang, and Hanhua Feng J. Vac. Sci. Technol. B 29, 021401 (2011) (6 pages) Abstract Full Text: [ Read Online (HTML) PDF (954 kB) ] Order |
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| David A. Czaplewski and Leonidas E. Ocola J. Vac. Sci. Technol. B 29, 021601 (2011) (7 pages) Abstract Full Text: [ Read Online (HTML) PDF (942 kB) ] Order |
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| Serkan Büyükköse, Boris Vratzov, and Wilfred G. van der Wiel J. Vac. Sci. Technol. B 29, 021602 (2011) (6 pages) Abstract Full Text: [ Read Online (HTML) PDF (871 kB) ] Order |
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| Dustin A. Richmond, Qifeng Zhang, Guozhong Cao, and Dirk N. Weiss J. Vac. Sci. Technol. B 29, 021603 (2011) (5 pages) Abstract Full Text: [ Read Online (HTML) PDF (334 kB) ] Order |
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| Takeru Okada (岡田健見), Jiro Fujimori (藤森二郎), Makoto Aida (会田真), Megumi Fujimura (藤村恵), Tatsuya Yoshizawa (吉澤達矢), Masahiro Katsumura (勝村昌広), and Tetsuya Iida (飯田哲哉) J. Vac. Sci. Technol. B 29, 021604 (2011) (5 pages) Abstract Full Text: [ Read Online (HTML) PDF (230 kB) ] Order |
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| Su Il Kim, Fabien Pradal, Hyunjoon Song, and Sehun Kim J. Vac. Sci. Technol. B 29, 021801 (2011) (5 pages) Abstract Full Text: [ Read Online (HTML) PDF (385 kB) ] Order |
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| Haiming Huang, Zhibing Li, Weiliang Wang, and Guihua Chen J. Vac. Sci. Technol. B 29, 021802 (2011) (5 pages) Abstract Full Text: [ Read Online (HTML) PDF (368 kB) ] Order |
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| A. Mayer J. Vac. Sci. Technol. B 29, 021803 (2011) (7 pages) Abstract Full Text: [ Read Online (HTML) PDF (186 kB) ] Order |
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| E. Hourdakis, A. G. Nassiopoulou, A. Parisini, M. A. Reading, J. A. van den Berg, L. Sygellou, S. Ladas, P. Petrik, A. Nutsch, M. Wolf, and G. Roeder J. Vac. Sci. Technol. B 29, 022201 (2011) (9 pages) Abstract Full Text: [ Read Online (HTML) PDF (478 kB) ] Order |
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| Zhang Jia, Vincent W. Lee, Yu-Jen Hsu, and Ioannis Kymissis J. Vac. Sci. Technol. B 29, 022401 (2011) (5 pages) Abstract Full Text: [ Read Online (HTML) PDF (228 kB) ] Order |
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| Yoshitaka Nakano, Mickael Lozac'h, Nobuyuki Matsuki, Kazuaki Sakoda, and Masatomo Sumiya J. Vac. Sci. Technol. B 29, 023001 (2011) (4 pages) Abstract Full Text: [ Read Online (HTML) PDF (288 kB) ] Order |
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| Kevin L. Jensen J. Vac. Sci. Technol. B 29, 02B101 (2011) (7 pages) Abstract Full Text: [ Read Online (HTML) PDF (579 kB) ] Order |
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| Jie Luo, Jun Chen, S. Z. Deng, and N. S. Xu J. Vac. Sci. Technol. B 29, 02B102 (2011) (5 pages) Abstract Full Text: [ Read Online (HTML) PDF (570 kB) ] Order |
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| Kentaro Iwami, Arata Iizuka, and Norihiro Umeda J. Vac. Sci. Technol. B 29, 02B103 (2011) (5 pages) Abstract Full Text: [ Read Online (HTML) PDF (183 kB) ] Order |
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| Parham Yaghoobi, Mehran Vahdani Moghaddam, Mario Michan, and Alireza Nojeh J. Vac. Sci. Technol. B 29, 02B104 (2011) (4 pages) Abstract Full Text: [ Read Online (HTML) PDF (168 kB) ] Order |
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| Marina Rucsandra Filip and Lucian Dragoş Filip J. Vac. Sci. Technol. B 29, 02B105 (2011) (6 pages) Abstract Full Text: [ Read Online (HTML) PDF (363 kB) ] Order |
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| Oktay Yilmazoglu, Ravi Joshi, Alexander Popp, Dimitris Pavlidis, and Jörg J. Schneider J. Vac. Sci. Technol. B 29, 02B106 (2011) (5 pages) Abstract Full Text: [ Read Online (HTML) PDF (392 kB) ] Order |
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| Arun Persaud, Ian Allen, Michael R. Dickinson, Thomas Schenkel, Rehan Kapadia, Kuniharu Takei, and Ali Javey J. Vac. Sci. Technol. B 29, 02B107 (2011) (4 pages) Abstract Full Text: [ Read Online (HTML) PDF (353 kB) ] Order |
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| Brady C. Smith, Charles E. Hunt, Ivor Brodie, and Arthur C. Carpenter J. Vac. Sci. Technol. B 29, 02B108 (2011) (5 pages) Abstract Full Text: [ Read Online (HTML) PDF (227 kB) ] Order |
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| Jim Browning and Jack Watrous J. Vac. Sci. Technol. B 29, 02B109 (2011) (7 pages) Abstract Full Text: [ Read Online (HTML) PDF (696 kB) ] Order |
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| F. Wakaya, T. Tatsumi, K. Murakami, S. Abo, M. Takai, T. Takimoto, and Y. Takaoka J. Vac. Sci. Technol. B 29, 02B110 (2011) (4 pages) Abstract Full Text: [ Read Online (HTML) PDF (413 kB) ] Order |
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| John Palma and Samson Mil'shtein J. Vac. Sci. Technol. B 29, 02B111 (2011) (4 pages) Abstract Full Text: [ Read Online (HTML) PDF (378 kB) ] Order |
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| Masayuki Nakamoto and Jonghyun Moon J. Vac. Sci. Technol. B 29, 02B112 (2011) (5 pages) Abstract Full Text: [ Read Online (HTML) PDF (642 kB) ] Order |
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| Mark J. Hagmann, Gagan Kumar, Shashank Pandey, and Ajay Nahata J. Vac. Sci. Technol. B 29, 02B113 (2011) (6 pages) Abstract Full Text: [ Read Online (HTML) PDF (171 kB) ] Order |
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| R. Kuljic, J. Chang, N. Jayapratha, T. Dankovic, K. Banerjee, A. Feinerman, and H. Busta J. Vac. Sci. Technol. B 29, 02B114 (2011) (5 pages) Abstract Full Text: [ Read Online (HTML) PDF (312 kB) ] Order |
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| Takatoshi Yamada, Christoph E. Nebel, and Takashi Taniguchi J. Vac. Sci. Technol. B 29, 02B115 (2011) (5 pages) Abstract Full Text: [ Read Online (HTML) PDF (245 kB) ] Order |
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| Keita Ikeda, Wataru Ohue, Keisuke Endo, Yasuhito Gotoh, and Hiroshi Tsuji J. Vac. Sci. Technol. B 29, 02B116 (2011) (6 pages) Abstract Full Text: [ Read Online (HTML) PDF (397 kB) ] Order |
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| S. Tsujino, M. Paraliev, E. Kirk, T. Vogel, F. Le Pimpec, C. Gough, S. Ivkovic, and H.-H. Braun J. Vac. Sci. Technol. B 29, 02B117 (2011) (7 pages) Abstract Full Text: [ Read Online (HTML) PDF (783 kB) ] Order |
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| Dan Nicolaescu, Shigeki Sakai, Yasuhito Gotoh, and Junzo Ishikawa J. Vac. Sci. Technol. B 29, 02B118 (2011) (9 pages) Abstract Full Text: [ Read Online (HTML) PDF (989 kB) ] Order |
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| T. Masuzawa, Y. Sato, Y. Kudo, I. Saito, T. Yamada, A. T. T. Koh, D. H. C. Chua, T. Yoshino, W. J. Chun, S. Yamasaki, and K. Okano J. Vac. Sci. Technol. B 29, 02B119 (2011) (6 pages) Abstract Full Text: [ Read Online (HTML) PDF (539 kB) ] Order |
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| Je Hwang Ryu, Na Young Bae, Hye Mi Oh, Otto Zhou, Jin Jang, and Kyu Chang Park J. Vac. Sci. Technol. B 29, 02B120 (2011) (5 pages) Abstract Full Text: [ Read Online (HTML) PDF (556 kB) ] Order |