Journal of Vacuum Science & Technology B (Microelectronics and Nanometer Structures)
March 2010
Volume 28, Issue 2, pp. L9-C2a1
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| Shinji Kawai, Kenta Ono, and Teruaki Motooka pp. L9-L12 Abstract Full Text: [ HTML Sectioned HTML PDF (360 kB) ] Order |
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| T. A. Khraishi, Y.-L. Shen, and Z. C. Leseman pp. L13-L16 Abstract Full Text: [ HTML Sectioned HTML PDF (487 kB) ] Order |
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| Chang Sung Moon, Keigo Takeda, Seigo Takashima, Makoto Sekine, Yuichi Setsuhara, Masaharu Shiratani, and Masaru Hori pp. L17-L20 Abstract Full Text: [ HTML Sectioned HTML PDF (174 kB) ] Order |
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| Geoffrey W. Burr, Matthew J. Breitwisch, Michele Franceschini, Davide Garetto, Kailash Gopalakrishnan, Bryan Jackson, Bülent Kurdi, Chung Lam, Luis A. Lastras, Alvaro Padilla, Bipin Rajendran, Simone Raoux, and Rohit S. Shenoy pp. 223-262 Abstract Full Text: [ HTML Sectioned HTML PDF (2358 kB) ] Order |
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| Takashi Nagase, Hiroyuki Kato, S. A. Pahlovy, and Iwao Miyamoto pp. 263-267 Abstract Full Text: [ HTML Sectioned HTML PDF (401 kB) ] Order |
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| O. Yilmazoglu, A. Popp, D. Pavlidis, and J. J. Schneider pp. 268-272 Abstract Full Text: [ HTML Sectioned HTML PDF (656 kB) ] Order |
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| M. M. Patterson, A. Cochran, J. Ferina, X. Rui, T. A. Zimmerman, Z. Sun, M. J. Kramer, D. J. Sellmyer, and J. E. Shield pp. 273-276 Abstract Full Text: [ HTML Sectioned HTML PDF (289 kB) ] Order |
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| S. Martini, J. E. Manzoli, and A. A. Quivy pp. 277-283 Abstract Full Text: [ HTML Sectioned HTML PDF (174 kB) ] Order |
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| Ming-Shu Kuo, Xuefeng Hua, G. S. Oehrlein, A. Ali, P. Jiang, P. Lazzeri, and M. Anderle pp. 284-294 Abstract Full Text: [ HTML Sectioned HTML PDF (533 kB) ] Order |
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| A. P. Caricato, N. T. Gorbachuk, A. M. Korduban, G. Leggieri, A. Luches, P. Mengucci, S. A. Mulenko, and D. Valerini pp. 295-300 Abstract Full Text: [ HTML Sectioned HTML PDF (286 kB) ] Order |
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| Lingling Tang and Tomoyuki Yoshie pp. 301-303 Abstract Full Text: [ HTML Sectioned HTML PDF (371 kB) ] Order |
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| Alexandra Imre, Leonidas E. Ocola, Lauren Rich, and Joseph Klingfus pp. 304-309 Abstract Full Text: [ HTML Sectioned HTML PDF (614 kB) ] Order |
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| Haitao Zhang, Terry T. Xu, Mingzheng Tang, Tsing-hua Her, and Shu-you Li pp. 310-315 Abstract Full Text: [ HTML Sectioned HTML PDF (912 kB) ] Order |
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| Guangyuan Si, Ee Jin Teo, Andrew A. Bettiol, Jinghua Teng, and Aaron J. Danner pp. 316-320 Abstract Full Text: [ HTML Sectioned HTML PDF (415 kB) ] Order |
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| Yu-Jen Fan, Leonid Yankulin, Alin Antohe, Petros Thomas, Chimaobi Mbanaso, Rashi Garg, Yunfei Wang, Andrea Wüest, Frank Goodwin, Sungmin Huh, Patrick Naulleau, Kenneth Goldberg, Iacopo Mochi, and Gregory Denbeaux pp. 321-328 Abstract Full Text: [ HTML Sectioned HTML PDF (1481 kB) ] Order |
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| S. Noor Mohammad pp. 329-352 Abstract Full Text: [ HTML Sectioned HTML PDF (641 kB) ] Order |
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| Shrikrishna Dattatraya Sartale and Michiko Yoshitake pp. 353-358 Abstract Full Text: [ HTML Sectioned HTML PDF (243 kB) ] Order |
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| Christopher M. Long, Antonios V. Giannopoulos, and Kent D. Choquette pp. 359-364 Abstract Full Text: [ HTML Sectioned HTML PDF (759 kB) ] Order |
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| K. H. Chen, C. Y. Chang, L. C. Leu, C. F. Lo, B. H. Chu, S. J. Pearton, and F. Ren pp. 365-370 Abstract Full Text: [ HTML Sectioned HTML PDF (441 kB) ] Order |
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| F. Bastiman, A. G. Cullis, M. Hopkinson, and K. J. Briston pp. 371-375 Abstract Full Text: [ HTML Sectioned HTML PDF (341 kB) ] Order |
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| Yu-Lin Wang, C. Y. Chang, Wantae Lim, S. J. Pearton, D. P. Norton, B. H. Chu, C. F. Lo, F. Ren, J. W. Johnson, P. Rajagopal, J. C. Roberts, E. L. Piner, and K. J. Linthicum pp. 376-379 Abstract Full Text: [ HTML Sectioned HTML PDF (140 kB) ] Order |
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| G. Y. Mak, E. Y. Lam, and H. W. Choi pp. 380-385 Abstract Full Text: [ HTML Sectioned HTML PDF (537 kB) ] Order |
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| Y. H. Chiu, Y. C. Ou, Y. Y. Liao, and M. F. Lin pp. 386-390 Abstract Full Text: [ HTML Sectioned HTML PDF (390 kB) ] Order |
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| Chan-Yuan Hu, Jone F. Chen, Shih-Chih Chen, Shoou-Jinn Chang, Shih-Ming Wang, Chih-Ping Lee, and Kay-Ming Lee pp. 391-397 Abstract Full Text: [ HTML Sectioned HTML PDF (661 kB) ] Order |
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| Takashi Yanagishita, Kazuyuki Nishio, and Hideki Masuda pp. 398-400 Abstract Full Text: [ HTML Sectioned HTML PDF (818 kB) ] Order |
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| Pierre Eyben, Francesca Clemente, Kris Vanstreels, Geoffrey Pourtois, Trudo Clarysse, Edouard Duriau, Thomas Hantschel, Kiroubanand Sankaran, Jay Mody, Wilfried Vandervorst, Kausala Mylvaganam, and Liangchi Zhang pp. 401-406 Abstract Full Text: [ HTML Sectioned HTML PDF (840 kB) ] Order |
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| Y. Liu, Å. F. Monsen, J. E. Boschker, E. Wahlström, A. Borg, and T. Tybell pp. 407-410 Abstract Full Text: [ HTML Sectioned HTML PDF (501 kB) ] Order |
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| O. S. Panwar, M. A. Khan, B. S. Satyanarayana, R. Bhattacharyya, B. R. Mehta, S. Kumar, and Ishpal pp. 411-422 Abstract Full Text: [ HTML Sectioned HTML PDF (800 kB) ] Order |
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| Tyler L. Westover, Aaron D. Franklin, Baratunde A. Cola, Timothy S. Fisher, and Ronald G. Reifenberger pp. 423-434 Abstract Full Text: [ HTML Sectioned HTML PDF (462 kB) ] Order |
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| Yoichiro Neo, Takahiro Matsumoto, Makoto Tomita, Masahiro Sasaki, Toru Aoki, and Hidenori Mimura pp. C2A1-C2A4 Abstract Full Text: [ HTML Sectioned HTML PDF (324 kB) ] Order |
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| Yahachi Saito, Tomohiro Matsukawa, Koji Asaka, and Hitoshi Nakahara pp. C2A5-C2A8 Abstract Full Text: [ HTML Sectioned HTML PDF (296 kB) ] Order |
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| K. Murakami, T. Matsuo, F. Wakaya, and M. Takai pp. C2A9-C2A12 Abstract Full Text: [ HTML Sectioned HTML PDF (327 kB) ] Order |
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| Shinya Nagashima, Syun Fujita, Kotaro Adachi, Yoichi Yamada, and Masahiro Sasaki pp. C2A13-C2A18 Abstract Full Text: [ HTML Sectioned HTML PDF (564 kB) ] Order |
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| M. S. Chung, B.-G. Yoon, A. Mayer, B. L. Weis, N. M. Miskovsky, and P. H. Cutler pp. C2A19-C2A23 Abstract Full Text: [ HTML Sectioned HTML PDF (299 kB) ] Order |
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| Shigekazu Nagai, Koichi Hata, Morihiro Okada, and Hidenori Mimura pp. C2A24-C2A27 Abstract Full Text: [ HTML Sectioned HTML PDF (349 kB) ] Order |
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| E. O. Popov, A. O. Pozdnyakov, O. F. Pozdnyakov, and Z. Z. Latypov pp. C2A28-C2A32 Abstract Full Text: [ HTML Sectioned HTML PDF (468 kB) ] Order |
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| Richard G. Forbes and Jonathan H. B. Deane pp. C2A33-C2A42 Abstract Full Text: [ HTML Sectioned HTML PDF (283 kB) ] Order |
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| Richard G. Forbes pp. C2A43-C2A49 Abstract Full Text: [ HTML Sectioned HTML PDF (112 kB) ] Order |
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| Shi-Dong Liang and Lu Chen pp. C2A50-C2A57 Abstract Full Text: [ HTML Sectioned HTML PDF (292 kB) ] Order |
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| V. Filip, J. Liu, C. K. Wong, H. Wong, D. Nicolaescu, V. Barna, and E. S. Barna pp. C2A58-C2A63 Abstract Full Text: [ HTML Sectioned HTML PDF (265 kB) ] Order |
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| Marina Rucsandra Filip, Ştefan Antohe, Lucian Ion, and Masaki Tanemura pp. C2A64-C2A71 Abstract Full Text: [ HTML Sectioned HTML PDF (212 kB) ] Order |
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| A. Evtukh, O. Yilmazoglu, V. Litovchenko, M. Semenenko, O. Kyriienko, H. L. Hartnagel, and D. Pavlidis pp. C2A72-C2A76 Abstract Full Text: [ HTML Sectioned HTML PDF (431 kB) ] Order |
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| Michito Kawasaki, Zhen He, Yasuhito Gotoh, Hiroshi Tsuji, and Junzo Ishikawa pp. C2A77-C2A82 Abstract Full Text: [ HTML Sectioned HTML PDF (417 kB) ] Order |
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| Yasuhiko Sugiyama, Yusuke Kobayashi, Yuuki Morikawa, Kazuo Kajiwara, and Koichi Hata pp. C2A83-C2A89 Abstract Full Text: [ HTML Sectioned HTML PDF (281 kB) ] Order |
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| Y. Kobayashi, Y. Sugiyama, Y. Morikawa, K. Kajiwara, and K. Hata pp. C2A90-C2A93 Abstract Full Text: [ HTML Sectioned HTML PDF (236 kB) ] Order |
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| M. S. Chung, B.-G. Yoon, P. H. Cutler, N. M. Miskovsky, B. L. Weiss, and A. Mayer pp. C2A94-C2A97 Abstract Full Text: [ HTML Sectioned HTML PDF (301 kB) ] Order |
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| Di Lu, Bo Liang, Akihisa Ogino, and Masaaki Nagatsu pp. C2A98-C2A103 Abstract Full Text: [ HTML Sectioned HTML PDF (675 kB) ] Order |
Materials [ Previous / Next Subject | Issue Index | Top / Bottom of Page]
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| Masayuki Nakamoto, Jonghyun Moon, and Koji Shiratori pp. C2B1-C2B5 Abstract Full Text: [ HTML Sectioned HTML PDF (462 kB) ] Order |
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| Yoshiyuki Hirano, Masakazu Nanba, Norifumi Egami, Susumu Yamazaki, and Nobuyoshi Koshida pp. C2B6-C2B10 Abstract Full Text: [ HTML Sectioned HTML PDF (450 kB) ] Order |
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| A. Evtukh, A. Medvid, P. Onufrijevs, M. Okada, and H. Mimura pp. C2B11-C2B13 Abstract Full Text: [ HTML Sectioned HTML PDF (321 kB) ] Order |
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| A. Navitski, G. Müller, V. Sakharuk, A. L. Prudnikava, B. G. Shulitski, and V. A. Labunov pp. C2B14-C2B19 Abstract Full Text: [ HTML Sectioned HTML PDF (918 kB) ] Order |
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| Huabing Tan, Ningsheng Xu, and Shaozhi Deng pp. C2B20-C2B23 Abstract Full Text: [ HTML Sectioned HTML PDF (356 kB) ] Order |
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| F. Wakaya, M. Miki, C. Fukuyama, K. Murakami, S. Abo, and M. Takai pp. C2B24-C2B26 Abstract Full Text: [ HTML Sectioned HTML PDF (216 kB) ] Order |
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| T. Kisa, K. Murakami, S. Abo, F. Wakaya, M. Takai, and T. Ishida pp. C2B27-C2B29 Abstract Full Text: [ HTML Sectioned HTML PDF (117 kB) ] Order |
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| Tomomi Yoshimoto, Hisanori Yui, and Tatsuo Iwata pp. C2B30-C2B33 Abstract Full Text: [ HTML Sectioned HTML PDF (332 kB) ] Order |
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| J. Q. Wu, Jun Chen, S. Z. Deng, and N. S. Xu pp. C2B34-C2B37 Abstract Full Text: [ HTML Sectioned HTML PDF (464 kB) ] Order |
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| Nguyen Tuan Hong, In Hyung Baek, Fabian Rotermund, Ken Ha Koh, and Soonil Lee pp. C2B38-C2B42 Abstract Full Text: [ HTML Sectioned HTML PDF (621 kB) ] Order |
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| Jungwoo Lee, Wonjoo Lee, Taehee Park, Jaeseung Lee, Eunkyung Park, Donghwan Lee, Jongtaek Lee, and Whikun Yi pp. C2B43-C2B46 Abstract Full Text: [ HTML Sectioned HTML PDF (452 kB) ] Order |
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| Hidenori Gamo, Mayuko Kikuchi, Takeshi Shibasaki, Toshihiro Ando, and Mikka Nishitani-Gamo pp. C2B47-C2B50 Abstract Full Text: [ HTML Sectioned HTML PDF (279 kB) ] Order |
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| Chaoyang Li, Tokiyoshi Matsuda, Toshiyuki Kawaharamura, Hiroshi Furuta, Mamoru Furuta, Takahiro Hiramatsu, Takashi Hirao, Yoichiro Nakanishi, and Keiji Ichinomiya pp. C2B51-C2B55 Abstract Full Text: [ HTML Sectioned HTML PDF (322 kB) ] Order |
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| Tadatsugu Minami, Toshihiro Miyata, Jun-ichi Ishino, and Keiichi Sahara pp. C2B56-C2B61 Abstract Full Text: [ HTML Sectioned HTML PDF (454 kB) ] Order |
Fabrication [ Previous / Next Subject | Issue Index | Top / Bottom of Page]
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| T. Yoshida, M. Nagao, and S. Kanemaru pp. C2C1-C2C4 Abstract Full Text: [ HTML Sectioned HTML PDF (319 kB) ] Order |
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| Nguyen Tuan Hong, Ken Ha Koh, Soonil Lee, Ngo Thi Thanh Tam, and Phan Ngoc Minh pp. C2C5-C2C8 Abstract Full Text: [ HTML Sectioned HTML PDF (361 kB) ] Order |
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| M. Zamri, Pradip Ghosh, Z. P. Wang, M. Kawagishi, A. Hayashi, Y. Hayashi, and M. Tanemura pp. C2C9-C2C12 Abstract Full Text: [ HTML Sectioned HTML PDF (509 kB) ] Order |
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| K. Murakami, N. Matsubara, S. Ichikawa, F. Wakaya, and M. Takai pp. C2C13-C2C15 Abstract Full Text: [ HTML Sectioned HTML PDF (343 kB) ] Order |
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| Gui Han, Atsushi Shibukawa, Morihiro Okada, Yoichiro Neo, Toru Aoki, and Hidenori Mimura pp. C2C16-C2C19 Abstract Full Text: [ HTML Sectioned HTML PDF (319 kB) ] Order |
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| Mamoru Kitaura, Shinji Tani, Seitaro Mitsudo, and Kazutoshi Fukui pp. C2C20-C2C25 Abstract Full Text: [ HTML Sectioned HTML PDF (557 kB) ] Order |
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| Morihiro Okada, Youichiro Neo, Hidenori Mimura, Shigekazu Nagai, and Koichi Hata pp. C2C26-C2C30 Abstract Full Text: [ HTML Sectioned HTML PDF (568 kB) ] Order |
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| Atsuo Jyouzuka, Tomonori Nakamura, Yoshihiro Onizuka, Hidenori Mimura, Takahiro Matsumoto, and Hiroshi Kume pp. C2C31-C2C36 Abstract Full Text: [ HTML Sectioned HTML PDF (327 kB) ] Order |
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| Arthur C. Carpenter and Charles E. Hunt pp. C2C37-C2C40 Abstract Full Text: [ HTML Sectioned HTML PDF (262 kB) ] Order |
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| T. Takikawa, H. Oki, Y. Matsuura, K. Murakami, S. Abo, F. Wakaya, and M. Takai pp. C2C41-C2C44 Abstract Full Text: [ HTML Sectioned HTML PDF (589 kB) ] Order |
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| R. Z. Zhan, Jun Chen, S. Z. Deng, and N. S. Xu pp. C2C45-C2C48 Abstract Full Text: [ HTML Sectioned HTML PDF (365 kB) ] Order |
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| Hidetaka Shimawaki, Katsuhisa Murakami, Yoichiro Neo, Hidenori Mimura, Fujio Wakaya, and Mikio Takai pp. C2C49-C2C52 Abstract Full Text: [ HTML Sectioned HTML PDF (512 kB) ] Order |
Applications [ Previous / Next Subject | Issue Index | Top / Bottom of Page]
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| Minoru Niigaki, Toru Hirohata, Wataru Akahori, and Hirofumi Kan pp. C2D1-C2D4 Abstract Full Text: [ HTML Sectioned HTML PDF (551 kB) ] Order |
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| Mitsuaki Takeuchi, Yasuhito Gotoh, Hiroshi Tsuji, Junzo Ishikawa, and Shigeki Sakai pp. C2D5-C2D10 Abstract Full Text: [ HTML Sectioned HTML PDF (238 kB) ] Order |
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| Tomonari Nakada, Takanobu Sato, Yohei Matsuba, Kazuto Sakemura, Yoshiyuki Okuda, Nobuyasu Negishi, Atsushi Watanabe, Takamasa Yoshikawa, Kiyohide Ogasawara, Masakazu Nanba, Kenkichi Tanioka, Norifumi Egami, Akira Kobayashi, and Nobuyoshi Koshida pp. C2D11-C2D14 Abstract Full Text: [ HTML Sectioned HTML PDF (406 kB) ] Order |
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| Jie Luo, Jun Chen, S. Z. Deng, Yu Zhang, and N. S. Xu pp. C2D15-C2D21 Abstract Full Text: [ HTML Sectioned HTML PDF (582 kB) ] Order |
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| Yuki Tsunekawa, Masashi Nakagawa, Hisashi Morii, Masayoshi Nagao, Tomoya Yoshida, Seigo Kanemaru, Yoichiro Neo, Toru Aoki, and Hidenori Mimura pp. C2D22-C2D25 Abstract Full Text: [ HTML Sectioned HTML PDF (465 kB) ] Order |
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| Hidenori Mimura p. C2a1 Abstract Full Text: [ HTML Sectioned HTML PDF (21 kB) ] Order |