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Journal of Vacuum Society and Technology B

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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures -- September 2008

Volume 26, Issue 5 , pp. L41-1823

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Letters Articles Brief Reports and Comments Shop Notes

Letters
	Study of substrate-directed ordering of long double-stranded DNA molecules on bare highly oriented pyrolytic graphite surface based on atomic force microscopy relocation imaging Huabin Wang, Hongjie An, Feng Zhang, Zhixiang Zhang, Ming Ye, Peng Xiu, Yi Zhang, and Jun Hu pp. L41-L44 Abstract    Full Text: [ HTML Sectioned HTML   PDF (299 kB)  GZipped PS   ]    Order
Articles
	Study of 193  nm photoresist degradation during short time fluorocarbon plasma exposure. I. Studies of modified layer formation M. Sumiya, R. Bruce, S. Engelmann, F. Weilnboeck, and G. S. Oehrlein pp. 1637-1646 Abstract    Full Text: [ HTML Sectioned HTML   PDF (311 kB)  GZipped PS   ]    Order
	Study of 193  nm photoresist degradation during short time fluorocarbon plasma exposures. II. Plasma parameter trends for photoresist degradation M. Sumiya, R. Bruce, S. Engelmann, F. Weilnboeck, and G. S. Oehrlein pp. 1647-1653 Abstract    Full Text: [ HTML Sectioned HTML   PDF (266 kB)  GZipped PS   ]    Order
	Comparative study of thermally cured and electron-beam-exposed hydrogen silsesquioxane resists Sookyung Choi, Michael J. Word, Vipan Kumar, and Ilesanmi Adesida pp. 1654-1659 Abstract    Full Text: [ HTML Sectioned HTML   PDF (140 kB)  GZipped PS   ]    Order
	Nanofabrication by mechanical and electrical processes using electrically conductive diamond tip Shojiro Miyake, Haifeng Zheng, Jongduk Kim, and Mei Wang pp. 1660-1665 Abstract    Full Text: [ HTML Sectioned HTML   PDF (673 kB)  GZipped PS   ]    Order
	Sub-50-nm track pitch mold using electron beam lithography for discrete track recording media R. Sbiaa, E. L. Tan, R. M. Seoh, K. O. Aung, S. K. Wong, and S. N. Piramanayagam pp. 1666-1669 Abstract    Full Text: [ HTML Sectioned HTML   PDF (654 kB)  GZipped PS   ]    Order
	Oxidation behavior of In95Sn5 solid solution S. Ramasamy, V. Sabarinathan, Nipun Agarwal, and David J. Smith pp. 1670-1674 Abstract    Full Text: [ HTML Sectioned HTML   PDF (591 kB)  GZipped PS   ]    Order
	Comparative study of Cl2, Cl2/O2, and Cl2/N2 inductively coupled plasma processes for etching of high-aspect-ratio photonic-crystal holes in InP C. F. Carlström, R. van der Heijden, M. S. P. Andriesse, F. Karouta, R. W. van der Heijden, E. van der Drift, and H. W. M. Salemink pp. 1675-1683 Abstract    Full Text: [ HTML Sectioned HTML   PDF (912 kB)  GZipped PS   ]    Order
	Plasma etch removal of poly(methyl methacrylate) in block copolymer lithography Yuk-Hong Ting, Sang-Min Park, Chi-Chun Liu, Xiaosong Liu, F. J. Himpsel, Paul F. Nealey, and Amy E. Wendt pp. 1684-1689 Abstract    Full Text: [ HTML Sectioned HTML   PDF (436 kB)  GZipped PS   ]    Order
	Fabrication of concave gratings by curved surface UV-nanoimprint lithography Yung-Pin Chen, Yuet-Ping Lee, Jer-Haur Chang, and Lon A. Wang pp. 1690-1695 Abstract    Full Text: [ HTML Sectioned HTML   PDF (917 kB)  GZipped PS   ]    Order
	Growth of nitrogen doped ZnO films through a nitrogen diffusion process from WN films formed by a cosputtering technique Jonghyun Lee, Jaehwan Ha, Jinpyo Hong, Seungnam Cha, and Ungyu Paik pp. 1696-1699 Abstract    Full Text: [ HTML Sectioned HTML   PDF (174 kB)  GZipped PS   ]    Order
	Field-emission fluorescent lamp using carbon nanotubes on a wire-type cold cathode and a reflecting anode J. X. Huang, Jun Chen, S. Z. Deng, J. C. She, and N. S. Xu pp. 1700-1704 Abstract    Full Text: [ HTML Sectioned HTML   PDF (748 kB)  GZipped PS   ]    Order
	Fabrication and properties of Cu–Ni mixed-metal periodical array for midinfrared filtering and hydrophobic application Wen-Hsien Huang, Yu-Lin Yang, and Shich-Chuan Wu pp. 1705-1711 Abstract    Full Text: [ HTML Sectioned HTML   PDF (909 kB)  GZipped PS   ]    Order
	Correlation of the growth rate for selective epitaxial growth of silicon and oxide thickness and oxide coverage in a reduced pressure chemical vapor deposition pancake reactor Kung-Yen Lee pp. 1712-1717 Abstract    Full Text: [ HTML Sectioned HTML   PDF (352 kB)  GZipped PS   ]    Order
	Optical properties and critical-point energies of BaTiO3 (001) from 1.5  to  5.2  eV S. G. Choi, A. M. Dattelbaum, S. T. Picraux, S. K. Srivastava, and C. J. Palmstrøm pp. 1718-1722 Abstract    Full Text: [ HTML Sectioned HTML   PDF (104 kB)  GZipped PS   ]    Order
	Comparative study of ZrN and Zr–Ge–N thin films as diffusion barriers for Cu metallization on Si L. C. Leu, P. Sadik, D. P. Norton, L. McElwee-White, and T. J. Anderson pp. 1723-1727 Abstract    Full Text: [ HTML Sectioned HTML   PDF (422 kB)  GZipped PS   ]    Order
	Nanochannels fabricated in polydimethylsiloxane using sacrificial electrospun polyethylene oxide nanofibers Leon M. Bellan, Elizabeth A. Strychalski, and Harold G. Craighead pp. 1728-1731 Abstract    Full Text: [ HTML Sectioned HTML   PDF (377 kB)  GZipped PS   ]    Order
	Programmable proximity aperture lithography with MeV ion beams Nitipon Puttaraksa, Sergey Gorelick, Timo Sajavaara, Mikko Laitinen, Somsorn Singkarat, and Harry J. Whitlow pp. 1732-1739 Abstract    Full Text: [ HTML Sectioned HTML   PDF (658 kB)  GZipped PS   ]    Order
	Comparison of selective Ge growth in SiO2 trenches on Si(001) and on blanket Si(001) substrates: Surface roughness and doping J.-S. Park, M. Curtin, J. M. Hydrick, M. Carroll, J. G. Fiorenza, A. Lochtefeld, and S. Novak pp. 1740-1744 Abstract    Full Text: [ HTML Sectioned HTML   PDF (767 kB)  GZipped PS   ]    Order
	Large areas of periodic nanoholes perforated in multistacked films produced by lift-off Wei Wu, Dibyendu Dey, Alex Katsnelson, Omer G. Memis, and Hooman Mohseni pp. 1745-1747 Abstract    Full Text: [ HTML Sectioned HTML   PDF (415 kB)  GZipped PS   ]    Order
	Self-aligned metal-contact and passivation technique for submicron ridge waveguide laser fabrication J. H. Teng, E. L. Lim, S. J. Chua, S. S. Ang, L. F. Chong, J. R. Dong, and R. Yin pp. 1748-1752 Abstract    Full Text: [ HTML Sectioned HTML   PDF (242 kB)  GZipped PS   ]    Order
	Iterative imprint for multilayered nanostructures by feeding, vacuum forming, and bonding of sheets Hideaki Suzuki, Keisuke Nagato, Shuntaro Sugimoto, Kensuke Tsuchiya, Tetsuya Hamaguchi, and Masayuki Nakao pp. 1753-1756 Abstract    Full Text: [ HTML Sectioned HTML   PDF (445 kB)  GZipped PS   ]    Order
	Electron field emission from ZnOx nanoparticles decorated on vertically aligned carbon nanotubes prepared by vapor-phase transport A. Wisitsoraat, A. Tuantranont, V. Patthanasettakul, and S. Mongpraneet pp. 1757-1760 Abstract    Full Text: [ HTML Sectioned HTML   PDF (751 kB)  GZipped PS   ]    Order
	Fabrication of gold tips suitable for tip-enhanced Raman spectroscopy Craig Williams and Debdulal Roy pp. 1761-1764 Abstract    Full Text: [ HTML Sectioned HTML   PDF (382 kB)  GZipped PS   ]    Order
	Effect of ZnO catalyst on carbon nanotube growth by thermal chemical vapor deposition Shih-Fong Lee, Yung-Ping Chang, and Li-Ying Lee pp. 1765-1770 Abstract    Full Text: [ HTML Sectioned HTML   PDF (1008 kB)  GZipped PS   ]    Order
	Single-pass forming for three-dimensional microstructures by high-speed shearing of multilayer thin films Tetsuya Hamaguchi, Hiroki Yonemoto, Keisuke Nagato, Kensuke Tsuchiya, and Masayuki Nakao pp. 1771-1774 Abstract    Full Text: [ HTML Sectioned HTML   PDF (428 kB)  GZipped PS   ]    Order
	ArF resist-friendly etching technology Toshio Hayashi, Yasuhiro Morikawa, Koukou Suu, and Michio Ishikawa pp. 1775-1781 Abstract    Full Text: [ HTML Sectioned HTML   PDF (986 kB)  GZipped PS   ]    Order
	Specific spectral features in electron emission from nanocrystalline silicon quasi-ballistic cold cathode detected by an angle-resolved high resolution analyzer Daisuke Sakai, Chunhei Oshima, Toshiyuki Ohta, and Nobuyoshi Koshida pp. 1782-1786 Abstract    Full Text: [ HTML Sectioned HTML   PDF (911 kB)  GZipped PS   ]    Order
	Deposition of NiOx thin films with radio frequency magnetron sputtering and their characteristics as a source/drain electrode for the pentacene thin film transistor Dong-Jin Yun and Shi-Woo Rhee pp. 1787-1793 Abstract    Full Text: [ HTML Sectioned HTML   PDF (868 kB)  GZipped PS   ]    Order
	Overcoming material challenges for replication of “motheye lenses” using step and flash imprint lithography for optoelectronic applications J. Kettle, R. T. Hoyle, R. M. Perks, and S. Dimov pp. 1794-1799 Abstract    Full Text: [ HTML Sectioned HTML   PDF (544 kB)  GZipped PS   ]    Order
	Deposition of WNxCy for diffusion barrier application using the imido guanidinato complex W(NiPr)Cl3[iPrNC(NMe2)NiPr] Hiral M. Ajmera, Andrew T. Heitsch, Timothy J. Anderson, Corey B. Wilder, Laurel L. Reitfort, Lisa McElwee-White, and David P. Norton pp. 1800-1807 Abstract    Full Text: [ HTML Sectioned HTML   PDF (771 kB)  GZipped PS   ]    Order
	Transferring optical proximity correction effects into a process model Jianliang Li, Qiliang Yan, and Lawrence S. Melvin, III pp. 1808-1812 Abstract    Full Text: [ HTML Sectioned HTML   PDF (577 kB)  GZipped PS   ]    Order
	Use of ion beam assisted deposition and low temperature annealing for the fabrication of low loss, vertically stacked alumina waveguide structures J. R. Nightingale, R. Goswami, J. Duperre, J. M. Dawson, L. A. Hornak, and D. Korakakis pp. 1813-1816 Abstract    Full Text: [ HTML Sectioned HTML   PDF (206 kB)  GZipped PS   ]    Order
Brief Reports and Comments
	Nonvolatile memory and antifuse behavior in Pt/a-TiO2/Ag structures T. Busani and R. A. B. Devine pp. 1817-1820 Abstract    Full Text: [ HTML Sectioned HTML   PDF (81 kB)  GZipped PS   ]    Order
Shop Notes
	Electron-beam lithography of multiple-layer submicrometer periodic arrays on a barium fluoride substrate J. S. Tharp, D. J. Shelton, S. L. Wadsworth, and G. D. Boreman pp. 1821-1823 Abstract    Full Text: [ HTML Sectioned HTML   PDF (160 kB)  GZipped PS   ]    Order

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Copyright 2008 Journal of Vacuum Society and Technology B