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Journal of Vacuum Society and Technology B

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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures -- July 2008

Volume 26, Issue 4 , pp. L33-1631

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Letters Review Article Regular Articles Brief Reports and Comments Shop Notes Errata PAPERS FROM THE 35th ANNUAL CONFERENCE ON THE PHYSICS AND CHEMISTRY OF SEMICONDUCTOR INTERFACES Organics Complex Oxides Oxide Semiconductors Characterization of Quantum Structures Strain Phenomena Carrier Dynamics III-V Surfaces Magnetic Tunnel Junctions Spintronics Nanostructures Nitride Semiconductors Integration III-V MOS Structures Oxides on Si Nanoscale Contacts PAPERS FROM THE SECOND INTERNATIONAL CONFERENCE ON ONE-DIMENSIONAL NANOMATERIALS

Letters
	Synthesis of nitrogen passivated rare-earth doped hafnia thin films and high temperature electrochemical conduction studies S. Ramanathan, A. Karthikeyan, S. A. Govindarajan, and P. D. Kirsch pp. L33-L35 Abstract    Full Text: [ HTML Sectioned HTML   PDF (241 kB)  GZipped PS   ]    Order
	Ion beam synthesis of Ni nanoparticles embedded in quartz P. Kumar, Ravi Kumar, D. Kanjilal, M. Knobel, P. Thakur, and K. H. Chae pp. L36-L40 Abstract    Full Text: [ HTML Sectioned HTML   PDF (938 kB)  GZipped PS   ]    Order
Review Article
	Gas-assisted focused electron beam and ion beam processing and fabrication Ivo Utke, Patrik Hoffmann, and John Melngailis pp. 1197-1276 Abstract    Full Text: [ HTML Sectioned HTML   PDF (5770 kB)  GZipped PS   ]    Order
Regular Articles
	Structural and electrical properties of Bi1.5Mg1.0Nb1.5O7 thin films deposited on Pt/TiO2/SiO2/Si substrates by rf-magnetron sputtering Jun-Ku Ahn, Nguyen Duy Cuong, Soon-Gil Yoon, and Chang-Soo Kim pp. 1277-1280 Abstract    Full Text: [ HTML Sectioned HTML   PDF (275 kB)  GZipped PS   ]    Order
	Surface roughness generated by plasma etching processes of silicon M. Martin and G. Cunge pp. 1281-1288 Abstract    Full Text: [ HTML Sectioned HTML   PDF (536 kB)  GZipped PS   ]    Order
	System-level line-edge roughness limits in extreme ultraviolet lithography Patrick P. Naulleau, Dimitra Niakoula, and Guojing Zhang pp. 1289-1293 Abstract    Full Text: [ HTML Sectioned HTML   PDF (350 kB)  GZipped PS   ]    Order
	Highly reliable growth process of carbon nanowalls using radical injection plasma-enhanced chemical vapor deposition Shingo Kondo, Masaru Hori, Koji Yamakawa, Shoji Den, Hiroyuki Kano, and Mineo Hiramatsu pp. 1294-1300 Abstract    Full Text: [ HTML Sectioned HTML   PDF (725 kB)  GZipped PS   ]    Order
	Metal-containing release layers for use with UV-cure nanoimprint lithographic template materials F. A. Houle, S. Raoux, D. C. Miller, C. Jahnes, and S. Rossnagel pp. 1301-1304 Abstract    Full Text: [ HTML Sectioned HTML   PDF (85 kB)  GZipped PS   ]    Order
	Stable field emission from screen-printed ZnO-tetrapod emitters Kai Hou, Chi Li, Wei Lei, Xiaobing Zhang, Ke Qu, Xiaxi Yang, Zhiwei Zhao, and Baoping Wang pp. 1305-1308 Abstract    Full Text: [ HTML Sectioned HTML   PDF (447 kB)  GZipped PS   ]    Order
	Conformal filling of silicon micropillar platform with 10boron N. Deo, J. R. Brewer, C. E. Reinhardt, R. J. Nikolić, and C. L. Cheung pp. 1309-1314 Abstract    Full Text: [ HTML Sectioned HTML   PDF (749 kB)  GZipped PS   ]    Order
	Synthesis and characterization of TiO2–Ge nanocomposites Amita Goyal, Abdul K. Rumaiz, Y. Miao, Sukti Hazra, C. Ni, and S. Ismat Shah pp. 1315-1320 Abstract    Full Text: [ HTML Sectioned HTML   PDF (250 kB)  GZipped PS   ]    Order
	Preparation and field emission property of nanodiamond-cluster-embedded diamondlike carbon film W. G. Xie, Jian Chen, W. W. Ming, Jun Chen, J. Zhou, S. Z. Deng, and N. S. Xu pp. 1321-1325 Abstract    Full Text: [ HTML Sectioned HTML   PDF (592 kB)  GZipped PS   ]    Order
	Smooth sidewall in InP-based photonic crystal membrane etched by N2-based inductively coupled plasma K. H. Lee, S. Guilet, G. Patriarche, I. Sagnes, and A. Talneau pp. 1326-1333 Abstract    Full Text: [ HTML Sectioned HTML   PDF (586 kB)  GZipped PS   ]    Order
	Characterization of photoconductive CdS thin films prepared on glass substrates for photoconductive-sensor applications Sung-Gi Hur, Eui-Tae Kim, Ji-Hong Lee, Geun-Hong Kim, and Soon-Gil Yoon pp. 1334-1337 Abstract    Full Text: [ HTML Sectioned HTML   PDF (433 kB)  GZipped PS   ]    Order
	Interfacial and electrical properties of ZrxTi1−xO4 (x=0.66) films deposited by liquid-delivery metal organic chemical vapor deposition to be used as high-k gate dielectric B. S. Sahu, S. V. N. Pammi, Nak-Jin Seong, and Soon-Gil Yoon pp. 1338-1343 Abstract    Full Text: [ HTML Sectioned HTML   PDF (583 kB)  GZipped PS   ]    Order
	Metal nanoparticle embedded porous thin films prepared by oblique angle coevaporation R. Blackwell and Y.-P. Zhao pp. 1344-1349 Abstract    Full Text: [ HTML Sectioned HTML   PDF (728 kB)  GZipped PS   ]    Order
	Optical and photocatalytic properties of oblique angle deposited TiO2 nanorod array Y. P. He, Z. Y. Zhang, and Y. P. Zhao pp. 1350-1358 Abstract    Full Text: [ HTML Sectioned HTML   PDF (523 kB)  GZipped PS   ]    Order
	Ti/Ni bilayer Ohmic contact on 4H-SiC Takasumi Ohyanagi, Yasuo Onose, and Atsuo Watanabe pp. 1359-1362 Abstract    Full Text: [ HTML Sectioned HTML   PDF (173 kB)  GZipped PS   ]    Order
	A thermocompressive bonding method using a pure sputtered Au layer and its wafer scale package application Jongseok Kim, Sangwook Kwon, Youngteak Hong, Insang Song, and Byeongkwon Ju pp. 1363-1367 Abstract    Full Text: [ HTML Sectioned HTML   PDF (540 kB)  GZipped PS   ]    Order
	Improvement in GaN and AlGaN/GaN Schottky diode performance by reduction in epitaxial film dislocation density D. J. Ewing, M. A. Derenge, P. B. Shah, U. Lee, T. S. Zheleva, and K. A. Jones pp. 1368-1372 Abstract    Full Text: [ HTML Sectioned HTML   PDF (588 kB)  GZipped PS   ]    Order
	Etching rate, optical transmittance, and charge trapping characteristics of Al-rich Al2O3 thin film fabricated by rf magnetron cosputtering Shunji Nakata, Shingo Nagai, Minoru Kumeda, Takeshi Kawae, Akiharu Morimoto, and Tatsuo Shimizu pp. 1373-1378 Abstract    Full Text: [ HTML Sectioned HTML   PDF (441 kB)  GZipped PS   ]    Order
	Flexible organic light-emitting diodes with improved performance by insertion of an UV-sensitive layer Lin Hui, Yu Junsheng, Wang Nana, Huang Chunhua, and Jiang Yadong pp. 1379-1381 Abstract    Full Text: [ HTML Sectioned HTML   PDF (294 kB)  GZipped PS   ]    Order
	Effects of film reoxidation on the growth and material properties of ultrathin dielectrics grown by rapid thermal nitridation in ammonia C. D'Emic, J. Newbury, C. Scerbo, M. Copel, and M. Gordon pp. 1382-1389 Abstract    Full Text: [ HTML Sectioned HTML   PDF (762 kB)  GZipped PS   ]    Order
	Direct UV-imprint lithography using conductive nanofiller-dispersed UV-curable resin Jun-Hyuk Choi, Soon-Won Lee, Dae-Geun Choi, Ki-Don Kim, Jun-Ho Jeong, and Eung-Suk Lee pp. 1390-1394 Abstract    Full Text: [ HTML Sectioned HTML   PDF (567 kB)  GZipped PS   ]    Order
	X-ray photoelectron spectroscopy and low-energy electron diffraction analyses on the extremely low work-function surface of W(100) modified by yttrium oxide Takashi Kawakubo, Yusuke Shimoyama, Hideaki Nakane, and Hiroshi Adachi pp. 1395-1397 Abstract    Full Text: [ HTML Sectioned HTML   PDF (301 kB)  GZipped PS   ]    Order
	Comparison between GaN thin film grown by femtosecond and nanosecond pulsed laser depositions X. L. Tong, D. S. Jiang, L. Liu, and H. Dai pp. 1398-1403 Abstract    Full Text: [ HTML Sectioned HTML   PDF (424 kB)  GZipped PS   ]    Order
	Spherical field emission cathode based on carbon nanotube paste and its application in luminescent bulbs Weiqi Fu, Peng Liu, Jie Tang, Liang Liu, and Shoushan Fan pp. 1404-1406 Abstract    Full Text: [ HTML Sectioned HTML   PDF (310 kB)  GZipped PS   ]    Order
	A study of patterning and annealing effects on the performance of magnetic planar inductor Hongfang Sun, Zewen Liu, Jiahao Zhao, Li Wang, and Jing Zhu pp. 1407-1411 Abstract    Full Text: [ HTML Sectioned HTML   PDF (614 kB)  GZipped PS   ]    Order
	High sensitivity cantilevers for measuring persistent currents in normal metal rings A. C. Bleszynski-Jayich, W. E. Shanks, B. R. Ilic, and J. G. E. Harris pp. 1412-1416 Abstract    Full Text: [ HTML Sectioned HTML   PDF (212 kB)  GZipped PS   ]    Order
	Effect of contact metals on the piezoelectric properties of aluminum nitride thin films J. Harman, A. Kabulski, V. R. Pagán, P. Famouri, K. R. Kasarla, L. E. Rodak, J. Peter Hensel, and D. Korakakis pp. 1417-1419 Abstract    Full Text: [ HTML Sectioned HTML   PDF (180 kB)  GZipped PS   ]    Order
	Electrical characteristics of Pt/Au Schottky contacts to plasma-etched AlGaN A. A. Syed, X. A. Cao, A. A. Woodworth, and C. D. Stinespring pp. 1420-1424 Abstract    Full Text: [ HTML Sectioned HTML   PDF (562 kB)  GZipped PS   ]    Order
	Atomic-scale cellular model and profile simulation of poly-Si gate etching in high-density chlorine-based plasmas: Effects of passivation layer formation on evolution of feature profiles Yugo Osano and Kouichi Ono pp. 1425-1439 Abstract    Full Text: [ HTML Sectioned HTML   PDF (2048 kB)  GZipped PS   ]    Order
Brief Reports and Comments
	Etching of TiN-based gates for advanced complementary metal-oxide-semiconductor devices V. Bliznetsov, N. Singh, R. Kumar, N. Balasubramanian, P. Guo, S. J. Lee, and Y. Cai pp. 1440-1444 Abstract    Full Text: [ HTML Sectioned HTML   PDF (596 kB)  GZipped PS   ]    Order
Shop Notes
	Influence of vacuum environment on conductive atomic force microscopy measurements of advanced metal-oxide-semiconductor gate dielectrics L. Aguilera, W. Polspoel, A. Volodin, C. Van Haesendonck, M. Porti, W. Vandervorst, M. Nafria, and X. Aymerich pp. 1445-1449 Abstract    Full Text: [ HTML Sectioned HTML   PDF (493 kB)  GZipped PS   ]    Order
Errata
	Erratum: “Recent advance in protection technology for extreme ultraviolet lithography masks under low-pressure condition” [J. Vac. Sci. Technol. B 26, L1 (2008)] Jung Hyeun Kim p. 1450 Abstract    Full Text: [ HTML Sectioned HTML   PDF (26 kB)  GZipped PS   ]    Order
PAPERS FROM THE 35th ANNUAL CONFERENCE ON THE PHYSICS AND CHEMISTRY OF SEMICONDUCTOR INTERFACES Organics [ Next Subject | Issue Index | Top / Bottom of Page]
	Interfacial effects in thin films of polymeric semiconductors Jonathan Rivnay, Leslie H. Jimison, Michael F. Toney, Michael Preiner, Nicholas A. Melosh, and Alberto Salleo pp. 1454-1460 Abstract    Full Text: [ HTML Sectioned HTML   PDF (451 kB)  GZipped PS   ]    Order
	Single molecule measurements with photoelectron emission microscopy Xianhua Kong, J. E. Rowe, and R. J. Nemanich pp. 1461-1465 Abstract    Full Text: [ HTML Sectioned HTML   PDF (333 kB)  GZipped PS   ]    Order
Complex Oxides [ Previous / Next Subject | Issue Index | Top / Bottom of Page]
	Depth-resolved cathodoluminescence spectroscopy study of defects in SrTiO3 Jun Zhang, S. Walsh, C. Brooks, D. G. Schlom, and L. J. Brillson pp. 1466-1471 Abstract    Full Text: [ HTML Sectioned HTML   PDF (690 kB)  GZipped PS   ]    Order
Oxide Semiconductors [ Previous / Next Subject | Issue Index | Top / Bottom of Page]
	Effects of oxygen contents in the active channel layer on electrical characteristics of ZnO-based thin film transistors Yeon-Keon Moon, Dae-Yong Moon, Sih Lee, Sang-Ho Lee, Jong-Wan Park, and Chang-Oh Jeong pp. 1472-1476 Abstract    Full Text: [ HTML Sectioned HTML   PDF (429 kB)  GZipped PS   ]    Order
	Impact of near-surface native point defects, chemical reactions, and surface morphology on ZnO interfaces D. R. Doutt, C. Zgrabik, H. L. Mosbacker, and L. J. Brillson pp. 1477-1482 Abstract    Full Text: [ HTML Sectioned HTML   PDF (731 kB)  GZipped PS   ]    Order
Characterization of Quantum Structures [ Previous / Next Subject | Issue Index | Top / Bottom of Page]
	Theory of electron tunneling through a scanning tunneling microscopy-tip/quantum dot junction David M.-T. Kuo and Yia-Chung Chang pp. 1483-1487 Abstract    Full Text: [ HTML Sectioned HTML   PDF (278 kB)  GZipped PS   ]    Order
	Imaging classical and quantum structures in an open quantum dot using scanning gate microscopy A. M. Burke, N. Aoki, R. Akis, Y. Ochiai, and D. K. Ferry pp. 1488-1491 Abstract    Full Text: [ HTML Sectioned HTML   PDF (290 kB)  GZipped PS   ]    Order
	Quantum ring formation and antimony segregation in GaSb/GaAs nanostructures R. Timm, A. Lenz, H. Eisele, L. Ivanova, M. Dähne, G. Balakrishnan, D. L. Huffaker, I. Farrer, and D. A. Ritchie pp. 1492-1503 Abstract    Full Text: [ HTML Sectioned HTML   PDF (613 kB)  GZipped PS   ]    Order
Strain Phenomena [ Previous / Next Subject | Issue Index | Top / Bottom of Page]
	Basal plane dislocation reduction for 8° off-cut, 4H-SiC using in situ variable temperature growth interruptions B. L. VanMil, R. E. Stahlbush, R. L. Myers-Ward, K.-K. Lew, C. R. Eddy, Jr., and D. K. Gaskill pp. 1504-1507 Abstract    Full Text: [ HTML Sectioned HTML   PDF (272 kB)  GZipped PS   ]    Order
Carrier Dynamics [ Previous / Next Subject | Issue Index | Top / Bottom of Page]
	Interaction of microwaves with photoelectrons in semiconductors R. K. Ahrenkiel and S. W. Johnston pp. 1508-1515 Abstract    Full Text: [ HTML Sectioned HTML   PDF (677 kB)  GZipped PS   ]    Order
III-V Surfaces [ Previous / Next Subject | Issue Index | Top / Bottom of Page]
	As-rich InAs(001)-(2×4) phases investigated by in situ surface x-ray diffraction B. P. Tinkham, W. Braun, K. H. Ploog, M. Takahasi, J. Mizuki, and F. Grosse pp. 1516-1520 Abstract    Full Text: [ HTML Sectioned HTML   PDF (344 kB)  GZipped PS   ]    Order
Magnetic Tunnel Junctions [ Previous / Next Subject | Issue Index | Top / Bottom of Page]
	Interface structure and transport of complex oxide junctions B. B. Nelson-Cheeseman, F. Wong, R. V. Chopdekar, M. Chi, E. Arenholz, N. D. Browning, and Y. Suzuki pp. 1521-1525 Abstract    Full Text: [ HTML Sectioned HTML   PDF (375 kB)  GZipped PS   ]    Order
Spintronics [ Previous / Next Subject | Issue Index | Top / Bottom of Page]
	Magnetocapacitance effect in InMnAs/InAs p-n heterojunctions N. Rangaraju and B. W. Wessels pp. 1526-1529 Abstract    Full Text: [ HTML Sectioned HTML   PDF (160 kB)  GZipped PS   ]    Order
	Electronic signature of MnAs phases in bare and buried films grown on GaAs(001) M. Moreno, A. Kumar, M. Tallarida, A. Ney, K. H. Ploog, and K. Horn pp. 1530-1533 Abstract    Full Text: [ HTML Sectioned HTML   PDF (298 kB)  GZipped PS   ]    Order
Nanostructures [ Previous / Next Subject | Issue Index | Top / Bottom of Page]
	Surface bonding effects in compound semiconductor nanoparticles: II H. H. Farrell pp. 1534-1541 Abstract    Full Text: [ HTML Sectioned HTML   PDF (1112 kB)  GZipped PS   ]    Order
Nitride Semiconductors [ Previous / Next Subject | Issue Index | Top / Bottom of Page]
	Steady state and transient behavior of currents in AlGaN/GaN planar Schottky diodes and mechanism of current collapse Hideki Hasegawa and Masamichi Akazawa pp. 1542-1550 Abstract    Full Text: [ HTML Sectioned HTML   PDF (787 kB)  GZipped PS   ]    Order
	Fabrication and characterization of novel monolayer InN quantum wells in a GaN matrix A. Yoshikawa, S. B. Che, N. Hashimoto, H. Saito, Y. Ishitani, and X. Q. Wang pp. 1551-1559 Abstract    Full Text: [ HTML Sectioned HTML   PDF (736 kB)  GZipped PS   ]    Order
Integration [ Previous / Next Subject | Issue Index | Top / Bottom of Page]
	Highly efficient vertical outgassing channels for low-temperature InP-to-silicon direct wafer bonding on the silicon-on-insulator substrate D. Liang and J. E. Bowers pp. 1560-1568 Abstract    Full Text: [ HTML Sectioned HTML   PDF (796 kB)  GZipped PS   ]    Order
III-V MOS Structures [ Previous / Next Subject | Issue Index | Top / Bottom of Page]
	Admittance study of GaAs high-k metal-insulator-semiconductor capacitors with Si interface control layer Masamichi Akazawa and Hideki Hasegawa pp. 1569-1578 Abstract    Full Text: [ HTML Sectioned HTML   PDF (345 kB)  GZipped PS   ]    Order
Oxides on Si [ Previous / Next Subject | Issue Index | Top / Bottom of Page]
	Atomic scale dielectric constant near the SiO2/Si(001) interface Sadakazu Wakui, Jun Nakamura, and Akiko Natori pp. 1579-1584 Abstract    Full Text: [ HTML Sectioned HTML   PDF (304 kB)  GZipped PS   ]    Order
	Optimum ambient N2 pressure during HfAlO pulsed-laser deposition in Pt/SBT/HfAlO/Si field effect transistors M. Takahashi, T. Horiuchi, S. Wang, Q.-H. Li, and S. Sakai pp. 1585-1587 Abstract    Full Text: [ HTML Sectioned HTML   PDF (345 kB)  GZipped PS   ]    Order
	Characteristics of lanthanum hafnium oxide deposited by electron cyclotron resonance atomic layer deposition Woong-Sun Kim, Tae-Sub Kim, Byung-Woo Kang, Myoung-Gyun Ko, Sang-Kyun Park, and Jong-Wan Park pp. 1588-1591 Abstract    Full Text: [ HTML Sectioned HTML   PDF (507 kB)  GZipped PS   ]    Order
Nanoscale Contacts [ Previous / Next Subject | Issue Index | Top / Bottom of Page]
	Nickel and nickel silicide Schottky barrier contacts to n-type silicon nanowires S. M. Woodruff, N. S. Dellas, B. Z. Liu, S. M. Eichfeld, T. S. Mayer, J. M. Redwing, and S. E. Mohney pp. 1592-1596 Abstract    Full Text: [ HTML Sectioned HTML   PDF (331 kB)  GZipped PS   ]    Order
	Au/Ag and Au/Pd molecular contacts to GaAs Azadeh Ahktari-Zavareh, Wenjie Li, Karen L. Kavanagh, Aaron J. Trionfi, Jason C. Jones, John L. Reno, Julia W. P. Hsu, and A. Alec Talin pp. 1597-1601 Abstract    Full Text: [ HTML Sectioned HTML   PDF (285 kB)  GZipped PS   ]    Order
PAPERS FROM THE SECOND INTERNATIONAL CONFERENCE ON ONE-DIMENSIONAL NANOMATERIALS
	Atomic force microscopy and scanning tunneling microscopy-spectroscopy characterization of ZnO nanobelts T. G. G. Maffeïs, M. W. Penny, M. R. Brown, K. W. Liew, D. Fu, N. Tsolakoglou, C. J. Wright, and S. P. Wilks pp. 1606-1608 Abstract    Full Text: [ HTML Sectioned HTML   PDF (221 kB)  GZipped PS   ]    Order
	Tunable double dots and Kondo enhanced Andreev transport in InAs nanowires T. Sand-Jespersen, M. Aagesen, C. B. Sørensen, P. E. Lindelof, and J. Nygård pp. 1609-1612 Abstract    Full Text: [ HTML Sectioned HTML   PDF (346 kB)  GZipped PS   ]    Order
	Other one-dimensional systems and thermal properties M. S. Dresselhaus, G. Dresselhaus, and Mario Hofmann pp. 1613-1618 Abstract    Full Text: [ HTML Sectioned HTML   PDF (472 kB)  GZipped PS   ]    Order
	Surface bound organic nanowires Frank Balzer, Manuela Schiek, Horst-Günter Rubahn, Katharina Al-Shamery, and Arne Lützen pp. 1619-1623 Abstract    Full Text: [ HTML Sectioned HTML   PDF (562 kB)  GZipped PS   ]    Order
	Generation of dc spin current in a narrow channel with Rashba and Dresselhaus spin-orbit interactions Chi-Shung Tang, Wen-Hsuan Kuan, Wen Xu, and Yia-Chung Chang pp. 1624-1627 Abstract    Full Text: [ HTML Sectioned HTML   PDF (274 kB)  GZipped PS   ]    Order
	Dimensionality in metal-oxide-semiconductor field-effect transistors: A comparison of one-dimensional and two-dimensional ballistic transistors Raseong Kim, Neophytos Neophytou, Abhijeet Paul, Gerhard Klimeck, and Mark S. Lundstrom pp. 1628-1631 Abstract    Full Text: [ HTML Sectioned HTML   PDF (456 kB)  GZipped PS   ]    Order

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Copyright 2008 Journal of Vacuum Society and Technology B